Resolution of micro-stereo-lithography system using high viscosity nanocomposites

［1］HA Y M, CHOI J W, LEE S H.  Mass production of 3-D microstructures using projection microstereolithography ［J］. Journal of Mechanical Science and Technology，2008, 22(2): 514-521.

［2］陆锦洪, 谢向生, 张培晴, 等. 基于数字微镜器件亚微米制备技术研究［J］. 光子学报, 2010, 39(4): 601-604.

LU Jin-hong, XIE Xiang-sheng, ZHAN Pei-qing, et al. Submicro-sized optical fabrication with DMD based lithography［J］. Acta Photonica Sinica, 2010, 39(4): 601-604. (in Chinese with an English abstract)

［3］胥光申, 马训鸣, 罗声, 等. 基于数字微反射镜器件的快速成形系统［J］. 中国激光, 2010, 37(7): 1892-1897.

    XU Guang-shen, MA Xun-ming, LUO Sheng, et al. Novel stereolithography system employing digital micro-mirror device［J］. Chinese Journal of Lasers, 2010, 37(7): 1892-1897. (in Chinese with an English abstract)

［4］于成龙, 王秀峰, 江红涛, 等. 微立体光刻技术研究及应用［J］. 激光与光电子学进展, 2006, 43(3): 15-20.

    YU Chen-long, WANG Xiu-feng, JIANG Hong-tao, et al. Development and application of microstereolithography［J］. Laser & Optoelectronics Progress, 2006, 43(3): 15-20. (in Chinese with an English abstract)

［5］VARADAN V K,JIANG X, VARADAN V V.  Microstereolithography and other fabrication techniques for 3D MEMS ［M］. New York :Chichester, 2001.

［6］IKUTA K, KIROWATARI K. Real three dimentional micro fabrication using stereo-lithography and

metal molding［J］. IEEE MEMS, 1993, 93: 42-47.

［7］BERTSH A, ZISSI S. Photolithography system with liquid crystal display as active gray-tone mask for 3D structuring of photoresist ［J］. Sensors and Actuators A, 2008, 144(2): 381-388.

［8］PROVIN C, MONNERT S. Complex ceramic-polymer composite microparts made by microstereolithography ［J］. Electronics Packaging Manufacturing, 2002, 25(1): 59-61.

［9］FARASASI M, TOURNIER F C,HUANG S. A novel high-accuracy micrestereolithography method employing an adaptive electropic mask ［J］. Material Processing Technology, 2000, 107(1): 167-172.

［10］PENG Q J, GUOY K, CHEN B, et al. LCD real-time mask technique for fabrication of arbitrarily shaped microstructure ［J］. SPIE, 2002，4755: 748-754.

［11］ BERTSCH A, BERNHARD P., VOGT C. Rapid prototyping of small size objects ［J］. Rapid Prototyping, 2000, 6(4): 259-266.

［12］BERTSCH A, JIGUET S,RENAUD P. Micro-fabrication of ceramic components by micro-stereolithography ［J］. Micromech Microeng, 2004, 14(2): 197-203.

［13］YANG H Y, RATCHEV S,TURITTO M. Rapid manufacturing of non-assembly complex micro-devices by micro-stereolithography ［J］. Tsinghua Science and Technology,2009, 14(S1): 164-167.

［14］KANG H Y, SEOL Y J,CHO D W. Development of an indirect solid freeform fabrication process based on microstereolithography for 3-D porous scaffolds ［J］. Journal of Micromechanics and Microengineering,2009, 19(1): 1-8.

［15］SUN C, FANG N,WU D M. Projection micro-stereolithography using digital micro-mirror dynamic mask ［J］. Sensors and Actuators A, 2005, 121(1): 113-120.

［16］WU D M, FANG N, SUN C, et al. Terahertz plasmonic high pass filter ［J］.Applied Physics Letters, 2003, 83(1): 201-203.

［17］WU D M.Micro fabrication of 3D structures and characterization of molecular machine ［D］. Los Angeles:Universtity of California, 2005.

［18］JACOBS P  F. Rapid prototyping and manufacturing fundamentals of stereolithography ［M］. Dearborn: Society of Manufacturing Eniginerrs Publishers, 1992.