Li Pan, Bai Man-she, Xing Yun-yun, Yan Ji-zhong. Experiment on defect-free edge polishing of LiNbO3 chips[J]. Journal of Applied Optics, 2014, 35(6): 1069-1074.
Citation: Li Pan, Bai Man-she, Xing Yun-yun, Yan Ji-zhong. Experiment on defect-free edge polishing of LiNbO3 chips[J]. Journal of Applied Optics, 2014, 35(6): 1069-1074.
shu

Experiment on defect-free edge polishing of LiNbO3 chips

  • AVIC Xi-an Flight Automatic Control Research Institute, Xi-an 710065,China

More Information
    Graphical Abstract
    • Abstract
  • To meet the requirements for defect-free edge polishing of high-precision fiber optic gyroscope integrated optic modulator LiNbO3 chips, a new polishing process based on pad polishing was developed. According to the analysis on the causes for edge damage during the edge polishing, three solutions were presented:controlling the big particles in polishing material, choosing the low sub-face damage polishing and making the particles size close to or less than double of the critical cutting depth. With the new process, the defect-free edge polishing of LiNbO3 chips could be achieved and the results show that the edges under 1 500 microscope have no visible defect, the chip end face roughness Ra is less than 0.8 nm and the surface flatness reaches better than /2.Additional,this polishing process has great application value.
    • FullText(HTML)
    • References (1)
  • [1]Lefevre H C. The fiber optic gyroscope [M]. Norwood: Artech House, 1993：1-4.
    [2]Weng Ju, Tian Chijun. IFOG progress toward high precision [J]. Journal of Chinese Inertial Technology, 2005, 13(5): 92-96.
    翁炬, 田赤军. 向高精度发展的干涉型光纤陀螺仪技术[J]. 中国惯性技术学报, 2005, 13(5): 92-96.
    [3]Liu Jieyu, Yang Jianye, Wang Lixin, et al. Error autocompensation of FOG-based rotating inertial measurement unit for ballistic missile [J]. Opto-Electronic Engineering, 2012, 39(6): 41-46.
    刘洁瑜, 杨建业, 汪立新, 等. 弹载光纤陀螺旋转惯组误差自补偿技术[J]. 光电工程, 2012, 39(6): 41-46.
    [4]Lei Feilin, Liu Jianwei, Wu Yujing, et al. Application of Kalman filter based fiber optic gyroscope in airborne electro-optical system [J]. Journal of Applied Optics, 2013, 34(1): 187-192.
    雷霏霖, 刘建伟, 吴玉敬, 等. 机载光电系统中光纤陀螺卡尔曼滤波方法应用[J]. 应用光学, 2013, 34(1): 187-192.
    [5]Zhang Guicai, Ba Xiaoyan. The influence of integrated optics device on the performance of fiber-optic gyroscope[J]. Navigation and Control, 2005, 4(1): 45-49.
    张桂才, 巴晓艳. 集成光学器件参数对光纤陀螺性能的影响[J]. 导航与控制, 2005, 4(1): 45-49.
    [6]Li Xuyou, Wang Changwei, Zou Jibin. The influence of integrated optic device-s stability for fibre optic gyroscopes [J]. Acta Photonica Sinica, 2005, 34(6): 830-834.
    李绪友, 王长伟, 邹继斌. 集成光学器件对光纤陀螺稳定性的影响的研究[J]. 光子学报, 2005, 34(6): 830-834.
    [7]Wang Minghua, Hao Yanlei, Li Xihua, et al. Fabrication techniques of ion-exchangedglass- based waveguides and related integrated optics components [J]. Infrared and Laser Engineering, 2006, 35（S）: 95-98.
    王明华, 郝寅雷, 李锡华,等. 离子交换玻璃光波导工艺与集成光学器件研究[J]. 红外与激光工程, 2006, 35（增刊）: 95-98.
    [8] Yin Xiaosu, Xiao Wen. Integrated optic modulator applied in fiber optic gyro [J]. Infrared and Laser Engineering, 2006, 35(3): 285-288.
    伊小素, 肖文. 集成光学调制器在光纤陀螺中的调制特性研究[J]. 红外与激光工程, 2006, 35(3): 285-288.
    [9] Brown  H, Ballman A A, Chin G Y. Knoop microhardness measurements on lithium niobate and lithium tantalate [J]. Journal of Materials Science, 1975, 10(7): 1157-1160.
    [10]Xing Tong, Yuan Julong, Zhao Wenhong, et al. Study on the chemo-mechanical polishing quality of LiNbO3 cubic flake [J]. Mechanical Engineer, 2003(7): 19-27.
    邢彤, 袁巨龙, 赵文宏,等. 铌酸锂晶片的化学机械抛光质量研究[J]. 机械工程师, 2003(7): 19-27.
    [11]Venables M A, Makh S S. Polishing of lithium niobate by ion-beam etching [J]. Journal of Materials Science Letters, 1987, 6: 1254-1256.
    [12]Zhang Y L, Yang J D, Feng J L, et al. LiNbO3 rhomboprism machining [J].  SPIE, 1998, 3557: 214-218.
    [13]Berggren R R, Schmell R A. Pad polishing for rapid production of large flats [R]. New Mexico: Los Alamos National Laboratory, 1997.
    [14]Bifano T G, Dow T A, Scattergood R O. Ductile-regime grinding: a new technology for machining brittle materials[J]. ASME Journal of Engineering for Industry, 1991, 113(2): 184-189.
    [15]Inrad. Inrad  lithium niobate[EB/OL]. (2002-7-31) [2013-6-25]. http://www.inrad.com/pdf/inrad%20Lithium%20Niobate.pdf.
    [16]Luo J F, Dornfeld D A. Material removal mechanism in chemical mechanical polishing: theory and modeling [J]. IEEE Transactions on Semiconductor Manufacturing, 2001, 14(2): 112-133.
    [17]Fuu G H, Chandra A, Guha S, et al. A plasticity-based model of material removal in chemical-mechanical polishing (CMP) [J]. IEEE Transactions on Semiconductor Manufacturing, 2001, 14(4): 406-417.
     
    • Related Articles

  • Related Articles

    [1]LIU Wei, MAO Yifan, HUO Sijia, YANG Shuai. Design of a spectroscopy-based detector for SO2 concentration in SF6 decomposition products[J]. Journal of Applied Optics.
    [2]CHAI Jinguo, YU Shancheng, ZHU Dandan, KANG Lixin, WANG Zhengtai, XU Lulu, REN Yuxuan, TONG Kai. Detection method for calibration of gas concentrations based on absorption peaks in frequency domain[J]. Journal of Applied Optics, 2024, 45(1): 142-149. DOI: 10.5768/JAO202445.0103002
    [3]DENG Qin. High-precision detection technology of NO concentration based on UV differential-adaptive interference cancellation[J]. Journal of Applied Optics, 2022, 43(6): 1054-1060. DOI: 10.5768/JAO202243.0604003
    [4]WANG Di, LI Yushaung, PU Yu, LYU Yan, GENG Jinjian, LI Dong. Study on temperature influence correction of gas concentration laser spectrum detection[J]. Journal of Applied Optics, 2020, 41(2): 348-353. DOI: 10.5768/JAO202041.0203002
    [5]FU Hongtao, YANG Erlong, LI Cunlei, LIU Jianmei, DONG Chi, SONG Lijia, GUO Chunping. Quantitative identification of hydrocarbon concentration in drilling fluid based on laser Raman spectroscopy[J]. Journal of Applied Optics, 2019, 40(4): 692-698. DOI: 10.5768/JAO201940.0407003
    [6]Zhu Hong-xiu, Sun Lian-kun, Wang Zhong-hua, Nie Zhe, Liu Huan. Design of infrared methane gas concentration detection system[J]. Journal of Applied Optics, 2014, 35(5): 890-894.
    [7]LIU Yu-zhi, PAN Duo-jun. Temperature and concentration effect on optical characteristics of H2SO4 aerosol[J]. Journal of Applied Optics, 2010, 31(2): 267-272.
    [8]LI Wen-chao, SHA Xiao-peng, LIU Zheng-jun, LI Zhi-quan, FENG Lei, MA Bo-hua. Gas concentration measurement based on fiber-circled cavity ring-down method[J]. Journal of Applied Optics, 2009, 30(5): 831-835.
    [9]LU Jian-min, SHAO Li-tang, TANG Guang-hua, WANG Shi-min. Nonlinear compensation of in-situ monitoring SO2 concentration in flue gas by DOAS[J]. Journal of Applied Optics, 2008, 29(6): 859-862.
    [10]WEI Peng, LI Li-jun, GUO Jun-qiang, CHU Yan-ling. Cross sensitivity of temperature in fiber Bragg grating strain sensing[J]. Journal of Applied Optics, 2008, 29(1): 105-109.

Catalog

    Get Citation
    PDF
    XML
    Article views (1454) PDF downloads (167) Cited by()
    Turn off MathJax
    Article Contents
    Abstract
    References
    Related Articles

    Related Databases

    Advertising cooperation

    Links

    Help Center

    WeChat

    You are the  2900079th  visitor, Welcome!

    Address: No.9, west section of No.3 electronic road, Xi'an　Post Code: 710065 Tel: 029-88288172

    Copyright © Editorial Department of Journal of Applied Optics

    陕公网安备 61011302001501号       陕ICP备19002862号-1

    Beijing Renhe Information Technology Co., Ltd.   support: info@rhhz.net   百度统计

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return