Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing

ZHANG Yu; ZHANG Feng; GUO Rui; SU Ying; ZHANG Yunlong; XU Zengqi; WANG Fuchao

doi:10.5768/JAO202243.0305002

Journal of Applied Optics > 2022 > 43(3): 518-523. > DOI: 10.5768/JAO202243.0305002

ZHANG Yu, ZHANG Feng, GUO Rui, SU Ying, ZHANG Yunlong, XU Zengqi, WANG Fuchao. Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing[J]. Journal of Applied Optics, 2022, 43(3): 518-523. DOI: 10.5768/JAO202243.0305002

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Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing

Xi'an Institute of Applied Optics, Xi'an 710065, China

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Received Date: November 17, 2021
Revised Date: December 17, 2021
Available Online: April 18, 2022

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Abstract

Abstract

In recent years, the magneto-rheological polishing as a deterministic processing method has become an essential way to obtain the high-precision aspheric surfaces. Take the rotationally symmetric secondary paraboloid as an example, the theoretical method of using the polishing wheel to calibrate the workpiece position in magneto-rheological polishing was analyzed, and the experimental verification was carried out on a Φ 230 mm fused quartz workpiece. The workpiece position was calibrated with less than 3 times of adjustment in the X direction and Y direction, respectively, and the offset in both X direction and Y direction was lower than 0.009 mm, respectively. The surface polishing experiment was conducted by magneto-rheological polishing technology on the workpiece, and the root-mean-square (RMS) of surface shape was converged from λ/7 to λ/40 after processing. The experimental results show that the proposed tooling calibration method of aspheric workpiece position is simple and reliable, which can accurately locate the workpiece and conducive to magneto-rheological polishing processing for high-precision aspheric surface.
- aspheric surface,
- magneto-rheological polishing,
- tooling calibration,
- surface shape accuracy

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References (16)

References

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Tooling calibration of secondary aspheric workpiece position in magneto-rheological polishing