GUO Wei-yuan, CHENG Xian-kai. Ion beam polishing with scanning mode of rectangular coordinates in polar coordinates system[J]. Journal of Applied Optics, 2012, 33(1): 164-169.
Citation: GUO Wei-yuan, CHENG Xian-kai. Ion beam polishing with scanning mode of rectangular coordinates in polar coordinates system[J]. Journal of Applied Optics, 2012, 33(1): 164-169.
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Ion beam polishing with scanning mode of rectangular coordinates in polar coordinates system

  • 1.

    National Astronomical Observatories / Nanjing Institute of Astronomical Optics &Technology,CAS,Nanjing 210042,China;

  • 2.

    Key Laboratory of Astronomical Optics &Technology,Nanjing Institute of Astronomical Optics &Technology,CAS,Nanjing 210042,China;

  • 3.

    Graduate University of Chinese Academy of Sciences,Beijing 100039,China

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    Graphical Abstract
    • Abstract
  • In the developing process of ion beam polishing equipment, the choice of scanning mode of ion source is very important. Traditional scanning process has two different ways. One is the mode of rectangular coordinates and the other is the mode of polar coordinates. According to the features of rectangular coordinate system and polar coordinate system, ion beam polishing with scanning mode of rectangular coordinates can be implemented in polar coordinates system. This method takes dwell time algorithm in rectangular scanning mode, which is much more simple. And in the same circumstances, its machinable round mirror caliber in polar scanning mode is bigger than that in rectangular scanning mode. Movable area of ion source in the way of polar coordinates is a line. Its rest place can be put other things, so dimensional utilization rate is higher. According to the simulation analysis of this new method, its feasibility has been proved.
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    • References (1)
  • ［1］WILSON S R, MCNEIL J R. Neutral ion beam figuring of large optical surfaces［J］. SPIE, 1987, 818: 320-324.
    ［2］ALLEN L N, KEIM R E. An ion figuring system for large optic fabrication［J］. SPIE, 1989, 1168: 33-50.
    ［3］CARNAL C L, EGERT C M, HYLTON K W. Advanced matrix-based algorithm for ion beam milling of optical components［J］. SPIE, 1992, 1752: 54-62.
    ［4］DRUEDING T W, BIFANO T G, FAWCETT S C. Contouring algorithm for ion figuring［J］. Precision Engineering, 1995, 17(1): 10-21.
    ［5］GAILLY P, COLLETTE J P, TOCK J P, et al. Ion beam figuring of small BK7 and Zerodur optics: thermal effects［J］. SPIE, 1999, 3739: 124-131.
    ［6］周林，戴一帆，解旭辉，等. 光学镜面离子束加工的可达性［J］. 光学精密工程，2007，15(2)：160-166.


    ZHOU Lin, DAI Yi-fan, XIE Xu-hui, et al. Machining reachability in ion beam figuring［J］. Optics and Precision Engineering, 2007, 15(2): 160-166. (in Chinese with an English abstract)
    ［7］解旭辉，焦长君，李圣怡，等. 离子束螺旋扫描方式修正光学镜面方法［J］. 机械工程学报，2009，45(12)：192-197.
    XIE Xu-hui, JIAO Chang-jun, LI Sheng-yi, et al. Ion beam figuring method for optical mirrors with spiral scan mode［J］. Journal of Mechanical Engineering, 2009, 45(12): 192-197. (in Chinese with an English abstract)
    ［8］GUO Wei-yuan, ZHENG Yi, WANG Hai, et al. Pilot study for ion beam figuring process［J］. SPIE, 2010, 7655: 76550N1-4.
    ［9］郭伟远，成贤锴. 在极坐标系统下进行直角坐标扫描方式的加工方法：中国，201110067364.8［P］. 2011-03-21.
    GUO Wei-yuan, CHENG Xian-kai. Processing method with scanning mode of rectangular coordinates in polar coordinates system: China, 201110067364.8［P］. 2011-03-21. (in Chinese)
    ［10］邓伟杰，郑立功，史亚莉，等. 基于线性代数和正则化方法的驻留时间算法［J］. 光学精密工程，2007，15(7)：1009-1015.
    DENG Wei-jie, ZHENG Li-gong, SHI Ya-li, et al. Dwell time algorithm based on matrix algebra and regularization method［J］. Optics and Precision Engineering, 2007, 15(7): 1009-1015. (in Chinese with an English abstract)
    ［11］俞敏，杨力，万勇建. 驻留时间参数优化分析［J］. 光学与光电技术，2006，4(1)：5-7.
    YU Min, YANG Li, WAN Yong-jian. Optimizing analyze on dwell-time parameters［J］. Optics & Optoelectronic Technology, 2006, 4(1): 5-7. (in Chinese with an English abstract)
    ［12］焦长君，李圣怡，解旭辉，等. 基于Bayesian原理的低陡度光学镜面面形误差离子束修正驻留时间算法［J］. 机械工程学报，2009，45(11)：253-259.
    JIAO Chang-jun, LI Sheng-yi, XIE Xu-hui, et al. Bayesian principle based dwell time algorithm for ion beam figuring of low gradient mirrors［J］. Journal of Mechanical Engineering, 2009, 45(11): 253-259. (in Chinese with an English abstract)
    ［13］周林，解旭辉，戴一帆，等. 光学平面镜面离子束修形中速度模式的实现［J］. 机械工程学报，2009，45(7)：152-156.
    ZHOU Lin, XIE Xu-hui, DAI Yi-fan, et al. Realization of velocity mode in flat optics machining using ion beam［J］. Journal of Mechanical Engineering, 2009, 45(7): 152-156. (in Chinese with an English abstract)
    ［14］郭伟远，成贤锴，白华. 离子束抛光工艺中驻留时间的分步消去算法［J］. 天文研究与技术，2011，8(4)：374-379.
    GUO Wei-yuan, CHENG Xian-kai, BAI Hua. Algorithm of dwell time of stepwise elimination for ion beam polishing［J］. Astronomical Research & Technology, 2011, 8(4): 374-379. (in Chinese with an English abstract)
    ［15］郭伟远，成贤锴，梁斌. 离子束抛光工艺中驻留时间的综合算法［J］. 应用光学，2011，32(5)：888-893.
    GUO Wei-yuan, CHENG Xian-kai, LIANG Bin. Dwell time algorithm of synthesis for ion beam polishing［J］. Journa1 of Applied Optics, 2011, 32(5): 888-893. (in Chinese with an English abstract)
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