Computeraided alignment method in afocal compressed optical path system
-
-
Abstract
To solve the alignment for the offaxis mirror with more variable and high sensitivity, we introduced the computeraided interferometry technology, built the relationship between the misalignment and primary aberration, as well as the mutual compensatory relationship of each element.Moreover,we accomplished the systematic assembly and adjustment efficiently and speedily by collecting systems wavefront aberration through interferometry, obtained the misalignment of each element through the reverse optimizing analysis.Results show that the final wavefront error of the afocal compressed optical path system is better than 0.055 RMS at = 632.8 nm across all image plane, and the compression ratio is less than 5.
-
-