ZHOU Tian-yu, YANG Kai-yong, WU Su-yong. ADetermination of optical constants and thicknesses of high-reflection multilayer system[J]. Journal of Applied Optics, 2011, 32(1): 128-132.
Citation: ZHOU Tian-yu, YANG Kai-yong, WU Su-yong. ADetermination of optical constants and thicknesses of high-reflection multilayer system[J]. Journal of Applied Optics, 2011, 32(1): 128-132.

ADetermination of optical constants and thicknesses of high-reflection multilayer system

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  • Genetic algorithm based on elite selection strategy has good ability of global optimization and robustness. The non-linear least square method with Levenberg-Marquardt algorithm has fast and efficient local convergence features. The feasibility and effectiveness of reverse engineering of optical constants and thicknesses by the combination of both algorithms were studied. The results indicate that the combined fitting method can be used to calculate the optical constants and thicknesses of multilayer with great feasibility and efficiency under the actual restrictions, especially in finding the global optimum solution. At the same time, based on the theory of the whole spectrum fitting, the combined fitting method was applied to calculate the optical constants and thicknesses of 15-layer high-reflection multilayer and accurate thin films' parameters were obtained. The fitting experiments show that the combined fitting method is practical in reverse engineering of optical constants and thicknesses of multilayer, and it can be used in optical reverse engineering.
  • [1]TIKHONOV A N, TIKHONRAVOV A V, TRUB-ETSKOV M K. Second order optimization methods in the synthesis of multilayer coatings[J]. Journal of Mathematical Physics, 1993,33(10):1339-1352.[2]TIKHONRAVOV A V,TRUBETSKOV M K,TIK-HONRAVOV A A, et al. Effects of interface roughness on the spectral properties of thin films and multilayer[J]. Applied Optics,2003,42(25):5140-5148.[3]王胭脂,张伟丽,范正修,等.SiO2薄膜折射率的准确拟合分析[J].中国激光,2008,35(5):760-763.WANG Yan-zhi, ZHANG Wei-li, FAN Zheng-xiu, et al. Analysis for accurately fitting the refractive index of SiO2 thin film[J]. Chinese Journal of Lasers, 2008,35(5):760-763. (in Chinese with an English abstract)[4]沈伟东,刘旭,叶辉,等.确定薄膜厚度和光学常数的一种新方法[J].光学学报,2004,24(7):885-889.SHEN Wei-dong, LIU Xu, YE Hui, et al. A new method for determination of the optical constants and thickness of thin film[J]. Acta Optica Sinica, 2004,24(7):885-889. (in Chinese with an English abstract)[5]顾培夫,陈海星,郑臻荣,等.弱吸收多层薄膜消光系数的反演[J].物理学报,2005,54(8):3722-3725.GU Pei-fu, CHEN Hai-xing, ZHENG Zhen-rong, et al. Determination of the extinction coefficient of a weakly absorbing multilayer system[J]. Acta Physica Sinica,2005,54(8):3722-3725. (in Chinese with an English abstract)[6]楚栋,宫兴致,程梁,等.基于遗传退火算法的多层薄膜厚度测量[J].光电工程,2010,37(2):45-49.CHU Dong, GONG Xing-zhi, CHENG Liang, et al. Multilayer film thickness measurement based on genetic simulated annealing algorithm[J]. Opto-Electronic Engineering, 2010,37(2):45-49. (in Chinese with an English abstract)[7]吴素勇.遗传算法在膜系设计中的应用[D].长沙:国防科技大学,2007:16-21.WU Su-yong. Design thin films by genetic algorithm[D]. Changsha: National University of Defence Technology, 2007:16-21. (in Chinese)[8]唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M].杭州:浙江大学出版社,2006.TANG Jin-fa, GU Peifu, LIU Xu, et al. Modern optical thin film technology[M]. Hangzhou: Zhejiang University Press, 2006. (in Chinese)[9]VERLY P G,TIKHONRAVOV A V,TRUBETSKOV M K.Efficient refinement algorithm for the synthesis of inhomogeneous optical coatings[J]. Applied Optics, 1997,36(7):1487-1495.[10]雷英杰,张善文,李续武,等.MATLAB遗传算法工具箱及应用[M].西安:西安电子科技大学出版社,2005.LEI Ying-jie, ZHANG Shan-wen, LI Xu-wu, et al. Introduce and apply the genetic algorithm search toolbox[M]. Xi’an: Xidian University Press, 2005. (in Chinese)[11]陈宝林.最优化理论与算法[M].北京:清华大学出版社,2005.CHEN Bao-lin. Optimization theory and algorithm[M]. Beijing: Tsinghua University Press, 2005. (in Chinese)[12]TIKHONRAVOV A V, TRUBETSKOV M K, KOKAREV M A, et al. Effects of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films[J]. Applied Optics,2002,41(13):2555-2560.[13]吴素勇,龙兴武,黄云,等.减小由光谱测量数据误差造成的薄膜光学参数反演不确定度的方法[J].中国激光, 2009,36(8):2171-2176.WU Su-yong,LONG Xing-wu,HUANG Yun,et al. Methods for decreasing optical parameters reverse determination uncertainty of thin films caused by spectral measurement errors[J]. Chinese Journal of Lasers, 2009,36(8):2171-2176. (in Chinese with an English abstract)

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