Application and comparison of simulated annealing algorithm and genetic algorithm in spectral ellipsometry data processing

A data processing program was written in MATLAB 6.5 with the simulated annealing algorithm and genetic algorithm to process the ellipsometry data detected by VASE Ellipsometer in the spectral range of 500nm～900nm. The evaluating function equation was improved according to the photometry principle of VASE Ellipsometer, and some calculations were made with some proper annealing and genetic parameters. The results of the data processing agree with those of the instrument processing. At last, the two algorithms were compared.