Twodimension compatible magneticfield analysis based on ANSYS

The magneticfield distribution of nonbalance magnetron sputtering coating equipment has a serious effect on film coating. A method that with the finite element method solves for magneticfield generated by live coil in nonbalance magnetron sputtering coating equipment is introduced. Based on the theory of electromagneticfield, the calculation model of magneticfield generated by live coil had been deduced and with the ANSYS based on finite element method, the magneticfield distribution caused by the coil in nonbalance magnetron sputtering coating equipment was simulated. The reliability of calculation model and results were verified by comparison with practical measurement results. The magneticfield distribution of nonbalance magnetron sputtering coating equipment is summarized, and it provide reference for optimizing a design plan of coating and improving the quality of thin films.