LI Long-kui, SU Junhong, LIANG Hong-jun. Twodimension compatible magneticfield analysis based on ANSYS[J]. Journal of Applied Optics, 2005, 26(6): 35-37.
Citation: LI Long-kui, SU Junhong, LIANG Hong-jun. Twodimension compatible magneticfield analysis based on ANSYS[J]. Journal of Applied Optics, 2005, 26(6): 35-37.
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Twodimension compatible magneticfield analysis based on ANSYS

  • 1.

    Key Lab of Thin Film Technology and Optical Test of Shaanxi Province,Xi′an Institute of Technology, Xi′an 710032,China;

  • 2.

    Xi′an Communication University,Xi′an 710106,China

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    • Abstract
  • The magneticfield distribution of nonbalance magnetron sputtering coating equipment has a serious effect on film coating. A method that with the finite element method solves for magneticfield generated by live coil in nonbalance magnetron sputtering coating equipment is introduced. Based on the theory of electromagneticfield, the calculation model of magneticfield generated by live coil had been deduced and with the ANSYS based on finite element method, the magneticfield distribution caused by the coil in nonbalance magnetron sputtering coating equipment was simulated. The reliability of calculation model and results were verified by comparison with practical measurement results. The magneticfield distribution of nonbalance magnetron sputtering coating equipment is summarized, and it provide reference for optimizing a design plan of coating and improving the quality of thin films.
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