Analysis of DMD diffraction effect and its generated stray light

YUAN Xiyao; HU Yuan; HUANG Yunhan; XU Yichen; QIN Mingze; LI Wenxuan

doi:10.5768/JAO202142.0401009

Journal of Applied Optics > 2021 > 42(4): 630-635. > DOI: 10.5768/JAO202142.0401009

YUAN Xiyao, HU Yuan, HUANG Yunhan, XU Yichen, QIN Mingze, LI Wenxuan. Analysis of DMD diffraction effect and its generated stray light[J]. Journal of Applied Optics, 2021, 42(4): 630-635. DOI: 10.5768/JAO202142.0401009

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Analysis of DMD diffraction effect and its generated stray light

YUAN Xiyao^{1, 2,},
HU Yuan^{1, 2, ,},
HUANG Yunhan^{1, 2},
XU Yichen^{1, 2},
QIN Mingze^{1, 2},
LI Wenxuan^{1, 2}

1.
School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
2.
Key Laboratory of Opto-Electronic Measurement and Optical Information Transmission Technology (Ministry of Education), Changchun 130022, China

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Received Date: November 19, 2020
Revised Date: December 14, 2020
Available Online: May 27, 2021

Graphical Abstract

Abstract

Abstract

Aiming at the problem that diffraction effect of digital micro-mirror device (DMD) has serious influence on system imaging, the stray light generated by DMD device was studied. Firstly, based on the rigorous coupled wave theory, the DMD diffraction model was constructed and the effects of different bands and incident angles on its diffraction efficiency were analyzed. It was concluded that the diffraction effect of DMD was more obvious in the long-wave infrared band, and the diffraction effect of DMD was more significant with the increase of incident angle. Secondly, the generation methods of diffracted stray light of DMD in the projection system was analyzed. By changing the number of F in the system, the incident angle was controlled, and then the energy proportion of stray light generated by the diffraction effect of DMD was calculated. Finally, the curve of the optical system with different number of F at different wavelengths along with the diffraction effect was obtained. The results show that the larger the F number, the smaller the influence of DMD diffraction effect on stray light.
- digital micro-mirror device,
- diffraction effect,
- rigorous coupled wave theory,
- stray light analysis

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References (15)

References

[1]	Texas Instruments Incorporated. Introduction to digital micromirror device(DMD)[EB/OL]. [2020-4-28]. https://www.ti.com/lit/pdf/dlpa008.
[2]	KEARNEY K J, NINKOV Z. Characterization of a digital micromirror device for use as an optical mask in imaging and spectroscopy[J]. SPIE,1998,3292:81-92.
[3]	韩庆. 数字微镜器件在红外目标场景仿真器中的应用研究[D]. 长春: 中国科学院长春光学精密机械与物理研究所, 2017. HAN Qing. Research on digital micromirror devices for use in infrared scene projector[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2017.
[4]	DUDLEY D, DUNCAN W, SLAUGHTER J. Emerging digital micromirror device (DMD) applications[J]. SPIE,2003,4985:14-25.
[5]	许富洋, 李勇, 高志强. 数字微镜器件闪耀特性及其在全息显示中的应用[J]. 光子学报,2011,40(3):332-335. doi: 10.3788/gzxb20114003.0332 XU Fuyang, LI Yong, GAO Zhiqiang. Blazing characteristics of DMD and its applications in holographic display[J]. Acta Photonica Sinica,2011,40(3):332-335. doi: 10.3788/gzxb20114003.0332
[6]	RICE J P, NEIRA J E, KEHOE M, et al. DMD diffraction measurements to support design of projectors for test and evaluation of multispectral and hyperspectral imaging sensors[J]. SPIE,2009,7210:72100D. doi: 10.1117/12.808990
[7]	CHEN X. Diffraction of digital micromirror device gratings and its effect on properties of tunable fiber lasers[J]. Applied Optics,2012,51(30):7214-7220. doi: 10.1364/AO.51.007214
[8]	HAN Q, ZHANG J Z, WANG J, et al. Diffraction analysis for DMD-based scene projectors in the long-wave infrared[J]. Applied Optics,2016,55(28):8016-8021. doi: 10.1364/AO.55.008016
[9]	熊峥. 基于DMD的数字光刻技术研究[D]. 长春: 中国科学院长春光学精密机械与物理研究所, 2016. XIONG Zheng. Research on DMD-based digital photolithography[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2016.
[10]	MOHARAM M G, GAYLORD T K. Diffraction analysis of dielectric surface -relief gratings[J]. JOSA,1982,72(10):1385-1392. doi: 10.1364/JOSA.72.001385
[11]	MOHARAM M G. Coupled-wave analysis of two-dimensional dielectric gratings[J]. SPIE,1988,883:8-11.
[12]	MOHARAM M G, GAYLORD T K. Rigorous coupled-wave analysis of planar-grating diffraction[J]. J. Opt. Soc. Am,1981,73(4):451-455.
[13]	张茜, 赵尚弘, 楚兴春. 严格耦合波法计算体布喇格光栅衍射效率[J]. 激光技术,2012,36(4):471-474. doi: 10.3969/j.issn.1001-3806.2012.04.010 ZHANG Qian, ZHAO Shanghong, CHU Xingchun. Calculation of diffraction efficiency of volume Bragg gratings with rigorous coupled-wave method[J]. Laser Technology,2012,36(4):471-474. doi: 10.3969/j.issn.1001-3806.2012.04.010
[14]	陈为, 廖胜. 严格耦合波法计算闪耀光栅衍射效率[J]. 应用光学,2009,30(5):734-738. CHEN Wei, LIAO Sheng. Rigorous coupled-wave method for diffraction efficiency calculation of blazed gratings[J]. Journal of Applied Optics,2009,30(5):734-738.
[15]	董亭亭. 仿生蛾眼抗反射微结构光学机理研究[D]. 长春: 长春理工大学, 2016. DONG Tingting. Research on optical mechanism of bionic Moth-eye antireflection microstructure[D]. Chang-chun: Changchun University of Science and Technology, 2016.

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Analysis of DMD diffraction effect and its generated stray light