基于外差干涉的微振动测量技术研究

刘丹, 郑宾, 郭华玲, 刘辉, 刘乃强

刘丹, 郑宾, 郭华玲, 刘辉, 刘乃强. 基于外差干涉的微振动测量技术研究[J]. 应用光学, 2014, 35(5): 858-861.
引用本文: 刘丹, 郑宾, 郭华玲, 刘辉, 刘乃强. 基于外差干涉的微振动测量技术研究[J]. 应用光学, 2014, 35(5): 858-861.
shu
Liu Dan, Zheng Bin, Guo Hua-ling, Liu Hui, Liu Nai-qiang. Micro-vibration measuring technology based on heterodyne interference[J]. Journal of Applied Optics, 2014, 35(5): 858-861.
Citation: Liu Dan, Zheng Bin, Guo Hua-ling, Liu Hui, Liu Nai-qiang. Micro-vibration measuring technology based on heterodyne interference[J]. Journal of Applied Optics, 2014, 35(5): 858-861.
shu

基于外差干涉的微振动测量技术研究

  • 1.

    中北大学 信息与通信工程学院,山西 太原 030051;

  • 2.

    中北大学 电子测试技术重点实验室,山西 太原 030051

详细信息
    通讯作者:

    刘丹(1989-),女,辽宁阜新人，硕士研究生,主要从事激光超声无损检测技术研究工作。 Email：liudanzhuimeng@sina.com

  • 中图分类号: TN247

Micro-vibration measuring technology based on heterodyne interference

  • 1.

    School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;

  • 2.

    National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China

摘要

    摘要
  • 摘要: 针对外差干涉的微振动测量存在稳定性低、严重受环境噪声影响等缺点，提出了对光路的改进方案。根据差分原理将其改为双光路，消除环境噪声的干扰；通过偏振分光棱镜（PBS）将椭圆偏振光变为线偏光，提高干涉信号幅值；改进频移装置(AOM)，抑制频率漂移；增加光阑，滤除杂散光，提高系统信噪比。通过探测5 kHz压电陶瓷振动信号，以及2.5 MHz高频激光超声信号进行实验验证，结果表明：信号稳定且无纹波，系统分辨率为2.3 nm，信噪比提高16.7倍。两路干涉信号幅值分别为552 mV和736 mV，较传统外差干涉信号幅值提高近10倍，有利于纳米量级微振动信号的检测。
    Abstract: Aiming at the problem that the micro-vibration based on heterodyne interference has low stability and is easily impacted by environmental noise, the ideas of optical path improvement were given. According to the difference principle, the single optical path was converted to a double optical path, in which the environmental noise was eliminated; The elliptically polarized light was changed into linearly polarized light to improve the interference signal amplitude by the polarization splitting prism (PBS); The acoustooptic modulator(AOM) was improved to inhibit frequency drift;The stray light was suppressed by using diaphragm filters so as to improve the system signal-noise ratio (SNR). The verification experiments were conducted through detecting 5 kHz piezoelectric vibration signal and 2.5 MHz laser ultrasonic signal .Experimental results indicate that signal is stable and has no ripple,the resolution is 2.3 nm and the SNR has improved by 16.7 times. The amplitudes of double-channel heterodyne interferometer signal is 552 mV and 736 mV, respectively, which are larger than traditional one nearly 10 times, it is advantageous to measure nanometer micro-vibration signals.
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    • 参考文献(1)
  • [1]Frank C D. Highresolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer[J].Electronics,1998,25(11):1527-1531.
    [2]Zhong Zhi, Tan Jiubin. Study on residual cumulative error in fast ultra-precision measurement by laser interference[J]. Journal of Optoel Ectronics Laser, 2005, 16(3):328-331.
    钟志, 谭久彬. 激光干涉快速超精密测量残余累计误差研究[J]. 光电子激光,2005,16(3):328-331.
    [3]Huo Lei, Zeng Xiaodong, Feng Zhejun. Non-reciprocal characteristics of acousto-optic devices in laser heterodyne interferometer[J].Journal of Optoel Ectronics Laser, 2011, 12:1765-1768.
    霍雷,曾晓东,冯喆珺,等. 激光外差干涉中声光器件非互易特性研究[J]. 光电子激光,2011,12:1765-1768.
    [4]Suat T. Heterodyne interferometric technique for displacement control at the nanometricscale[J]. Review of Scientific Instruments,2003,74(11): 4876-4880.
    [5]Gong Yuliang, Li Hongwei, Bai Shiwu. Principle, method and experiment of ultrasonic displacement measurement by laser heterodyne interferometer[J].Acta Acustica, 1996, 21(3):259-264.
    龚育良，李红卫，白世武．激光外差探测超声位移的原理、方法和实验[J].声学学报1996,2l(3):259-264．
    [6] Monchalin J P. Heterodyne interferometer laser probe to measure continuous ultrasonic displacement[J].Rev.Sci.Instrum.,1985,56(4):543-546.
    [7] Chen Hongfang, Ding Xuemei, Zhong Zhi, et al.High acceleration ultra-precision measurement model in laser heterodyne -interferometer[J]. Opto Electronic Engineering,2007,34(8):72-75.
        陈洪芳,丁雪梅,钟志,等.高加速度超精密激光外差干涉测量模型[J].光电工程,2007,34(8):72-75.
    [8] Xu Su-an, Chen Le, Sun Jian, et al. Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system[J].Chinese Optics Letters,2013,11(6): 197-201.
    [9] Hou Wenmei,Wang Jun. Subdivision and elimination of nonlinearity in heterodyne   interferometers[J].Acta Metrologica Sinica,2007,28(3):210-215.
    侯文玫,王俊.外差激光干涉仪非线性的细分和消除[J].计量学报,2007,28(3):210-215.
    [10]Zhou Xiaoshan, Li Yan.  Absolute distance measurement by combining phase distance meter and heterodyne interferometer[J]. Journal of Applied Optics,2010,31(6):1013-1017.
    周小珊,李岩.相位激光测距与外差干涉相结合的绝对距离测量研究[J].应用光学,2010,31(6):1013-1017.
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  • 刊出日期:  2014-10-14

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