微型宽波段光谱仪光学系统设计

Design of optical system for broad-band micro-spectrometer

摘要: 针对国内基于M型Czerny-Turner结构的宽波段微型光谱仪研究较少的情况，对微型宽波段光谱仪进行了设计，并提出了完整的设计流程。根据几何光学原理，分析了光学系统各个参数之间的约束关系，据此设计、计算得到了光学系统的基本参数，并使用Zemax进行仿真。为了提高仪器的紫外响应，在CCD的前端增加了Lumogen镀膜的滤光片。实际制做的光谱仪测量结果表明：光谱仪的分辨率在200 nm~1100 nm全波段范围内达到1.5 nm，中心分辨率达到1 nm，满足设计需求。

Abstract: Aiming at the situation that there have been less researches on the wide-band micro-spectrometer based on the M type Czerny-Turner structure, the wide-band micro-spectrometer was designed and the complete design flow was put forward. According to the principle of geometrical optics, the constraint relations among the parameters of optics system were analyzed, then the main parameters were obtained through design and calculation, and simulation was conducted by using Zemax.The measurement results for actual production of the spectrometer show that the resolution reaches 1.5 nm in 200 nm~1100 nm full band and 1 nm in mid, which meets the demands of the design.