一种提高干涉相位识别精度的方法

杨练根; 刘丙康; 王选择; 翟中生

doi:10.5768/JAO201536.0403006

一种提高干涉相位识别精度的方法

1.
湖北工业大学机械工程学院,湖北武汉 430068;
2.
天津大学精密测试技术及仪器国家重点实验室,天津 300072

基金项目:

国家自然科学基金(51275157;51175154);天津大学精密测试技术及仪器国家重点实验室开放基金(PIL1209)

详细信息

通讯作者:
杨练根(1965-)，男，湖南平江人，博士，教授，主要从事精密测量技术及仪器方面的研究。 Email：yanglg@mail.hbut.edu.cn

中图分类号: TH741
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出版历程

Method for improving precision of interferometric phase-recognization

1.
Mechanical Engineering School,Hubei University of Technology,Wuhan 430068,China;
2.
State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China

摘要

摘要: 针对开环相移驱动下的单色光干涉测量，提出一种满足四步法的高精度相位识别的方法。首先选取干涉场中存在适当相位差的两像素点，建立相移驱动单周期内两像素点灰度序列值之间的干涉方程组。运用椭圆拟合获取相应干涉方程组参数，然后通过反算序列相位确定逐点驱动步长或序列相位信息。结合序列相位信息，运用Lagrange抛物插值算法，设计计算满足四步法的4幅干涉图，并计算各像素点的初相位。最后，运用多波长算法计算表面形貌并进行误差分析。实验表明：计算得到的方波多刻线样板的Ra值为0.439 0 m，测量误差为0.23%,此方法降低了对测量条件的硬件与环境要求，满足表面形貌高精度测量的要求。
- 干涉测量 /
- 相位识别 /
- 椭圆拟合 /
- Lagrange插值
Abstract: For monochromatic light interferometry under open-loop phase shifter, a high precision method for phase recognization was developed to satisfy four-step phase-shift algorithm. Firstly two pixels with suitable phase-difference were selected from the interference field, and the interference equations of the two pixels gray values were established in one phase-shifting cycle. Secondly, the interference equations parameters could be obtained by using ellipse fitting algorithm, and the point-to-point driven step length and sequence phases could be determined through back calculation of sequence phases. Then four interference gray scales meeting the four-step phase-shift algorithm were designed and calculated through Lagrange parabolic interpolation, which were used to calculate the initial phase of every pixel. Finally, the surface topography was calculated through multi-wavelength algorithm and the measurement errors were analyzed. Experimental results show that the Ra value of square wave specimen with multiple grooves is 0.4390m, and the measurement error is 0.23%. This method decreases the requirement for hardware and environment. It can meet the high precision demands of surface topography measurement.
- interference measurement /
- phase-recognization /
- ellipse fitting /
- Lagrange interpolation

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参考文献(1)

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(上接第571页)

陶本藻，姚宜斌. 基于多面核函数配置型模型的参数估计[J].武汉大学学报：信息科学版，2003,28（5）：547-550
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一种提高干涉相位识别精度的方法

通讯作者:
杨练根(1965-)，男，湖南平江人，博士，教授，主要从事精密测量技术及仪器方面的研究。 Email：yanglg@mail.hbut.edu.cn

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Method for improving precision of interferometric phase-recognization

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一种提高干涉相位识别精度的方法

通讯作者: 杨练根(1965-)，男，湖南平江人，博士，教授，主要从事精密测量技术及仪器方面的研究。 Email：yanglg@mail.hbut.edu.cn

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Method for improving precision of interferometric phase-recognization

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通讯作者:
杨练根(1965-)，男，湖南平江人，博士，教授，主要从事精密测量技术及仪器方面的研究。 Email：yanglg@mail.hbut.edu.cn