Zhang Ya-ya, Cui Jian-guo. Rapid microfabrication technology based on digital lithography projection system[J]. Journal of Applied Optics, 2015, 36(3): 448-453. DOI: 10.5768/JAO201536.0305001
Citation: Zhang Ya-ya, Cui Jian-guo. Rapid microfabrication technology based on digital lithography projection system[J]. Journal of Applied Optics, 2015, 36(3): 448-453. DOI: 10.5768/JAO201536.0305001

Rapid microfabrication technology based on digital lithography projection system

  • To design a cost-effective microfluidic chip-s processing method, which can quickly fabricate different size micro-channels on polydimethylsiloxane (PDMS) surface, we used the method depending on the imaging principle of commercial digital projector, carried on the simple configuration, and then got a reduced image named as digital lithography projection system (DLPS), which could be used to fabricate the micro-channel on the PDMS surface.Moreover, through lotus leaf effect and capillary adsorption effect experiments, the processing performance of DLPS was verified and applied. Results show that the DLPS can process microstructure on PDMS surface, the minimum stable machining precision can reach 40 m, through the simulation of lotus leaf effect ,the material surface-s hydrophobic angle is 1233. The DLPS can be used for rapid processing of microfluidic chip, and when the channel size is not very strict, this low-cost and high-efficiency can make the system completely suitable for general laboratory.
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