李燕, 范纪红, 俞兵, 袁林光, 孙宇楠, 秦艳, 马力. 低温辐射计紫外探测器光谱响应度测试技术研究[J]. 应用光学, 2022, 43(2): 311-316. DOI: 10.5768/JAO202243.0204001
引用本文: 李燕, 范纪红, 俞兵, 袁林光, 孙宇楠, 秦艳, 马力. 低温辐射计紫外探测器光谱响应度测试技术研究[J]. 应用光学, 2022, 43(2): 311-316. DOI: 10.5768/JAO202243.0204001
LI Yan, FAN Jihong, YU Bing, YUAN Lin'guang, SUN Yu'nan, QIN Yan, MA Li. Spectral responsivity measurement technology for UV detector based on cryogenic radiometer[J]. Journal of Applied Optics, 2022, 43(2): 311-316. DOI: 10.5768/JAO202243.0204001
Citation: LI Yan, FAN Jihong, YU Bing, YUAN Lin'guang, SUN Yu'nan, QIN Yan, MA Li. Spectral responsivity measurement technology for UV detector based on cryogenic radiometer[J]. Journal of Applied Optics, 2022, 43(2): 311-316. DOI: 10.5768/JAO202243.0204001

低温辐射计紫外探测器光谱响应度测试技术研究

Spectral responsivity measurement technology for UV detector based on cryogenic radiometer

  • 摘要: 通过研制真空多光路切换组件,结合Y型真空比较通道、探测器真空舱,在保证超高真空环境的前提下,实现激光、紫外连续可调单色光以及真空紫外单色光3个光路的快速切换,从而以低温辐射计为基准,以紫外增强硅陷阱探测器为传递标准,实现波长115 nm~400 nm紫外探测器绝对光谱响应度的测量,实验验证绝对光谱响应度测量不确定度在115 nm~230 nm可达到0.8%~1.5% (k=2),在230 nm~400 nm可达到0.5%~1.0% (k=2)。

     

    Abstract: By developing the vacuum multi-optical path switching component, the Y-type vacuum comparison channel and detector vacuum chamber were combined. A rapid switching of laser, ultraviolet continuous tunable monochromatic light and vacuum ultraviolet monochromatic light was realized with ultra-high vacuum environment guaranteed. Utilizing a cryogenic radiometer as the measurement datum and a UV-enhanced silicon trap detector as the transfer standard, the absolute spectral responsivity of UV detectors from 115 nm to 400 nm were measured. Experimental results show an absolute spectal responsivity measurement uncertainty of 0.8%~1.5% (k=2) from 115 nm to 230 nm, and 0.5%~1.0% (k=2) from 230 nm to 400 nm.

     

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