魏冬, 桑梅, 禹敏慧, 黄耀慷, 刘红光, 刘铁根. 基于频域变换的MEMS声学薄膜缺陷检测算法[J]. 应用光学, 2021, 42(6): 1086-1091. DOI: 10.5768/JAO202142.0603005
引用本文: 魏冬, 桑梅, 禹敏慧, 黄耀慷, 刘红光, 刘铁根. 基于频域变换的MEMS声学薄膜缺陷检测算法[J]. 应用光学, 2021, 42(6): 1086-1091. DOI: 10.5768/JAO202142.0603005
WEI Dong, SANG Mei, YU Minhui, HUANG Yaokang, LIU Hongguang, LIU Tiegen. Defect detection algorithm of MEMS acoustic film based on frequency domain transformation[J]. Journal of Applied Optics, 2021, 42(6): 1086-1091. DOI: 10.5768/JAO202142.0603005
Citation: WEI Dong, SANG Mei, YU Minhui, HUANG Yaokang, LIU Hongguang, LIU Tiegen. Defect detection algorithm of MEMS acoustic film based on frequency domain transformation[J]. Journal of Applied Optics, 2021, 42(6): 1086-1091. DOI: 10.5768/JAO202142.0603005

基于频域变换的MEMS声学薄膜缺陷检测算法

Defect detection algorithm of MEMS acoustic film based on frequency domain transformation

  • 摘要: 微机电系统(micro-electro-mechanical system,MEMS)声学薄膜对流片、存储和封装环境要求极高,其表面缺陷会影响MEMS器件的质量和性能。图像检测缺陷是一种有效的非接触光学检测手段,可以有效提高MEMS生产的良品率,然而MEMS器件表面的周期性结构纹理会对缺陷检测产生干扰。提出了一种基于频域变换的声学薄膜缺陷检测算法,通过计算频谱图的梯度分布和建立布尔掩码以消除图像中周期性结构纹理对应的主频分量,将剩余频谱图进行傅里叶逆变换重构缺陷图像,对重构图像采用单层Haar小波分解去噪获得低频子带图像,采用简单的阈值分割提取缺陷信息,展示了不同种类MEMS声学薄膜的缺陷检测效果。实验结果表明,缩放常数t_g的取值范围为0.7~1.0比较合理。

     

    Abstract: The micro-electro-mechanical system (MEMS) acoustic film has extremely high requirements for tape-out, storage and packaging environments, and its surface defects will affect the quality and performance of MEMS devices. The image defects detection is an effective non-contact optical detection means that can effectively improve the yield rate of MEMS production. However, the periodic structure texture of the MEMS devices surface will interfere with defect detection. A acoustic film defect detection algorithm based on frequency domain transformation was proposed. By calculating the gradient distribution of spectrogram and establishing the Boolean mask, the dominant frequency components corresponding to the periodic structure texture were eliminated. The residual spectrograms were subjected to a Fourier inversion to reconstruct the defect images. The reconstructed images were decomposed by single-layer Haar wavelet to obtain the low-frequency sub-band image and the defect information was extracted by simple threshold segmentation. The defect detection effects of different types of MEMS acoustic film were showed. The experimental results show that it is reasonable to set the zoom constant in the range of 0.7~1.0.

     

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