宁悦文, 胡摇, 陶鑫, 郝群. 基于偏振衍射色散共焦的光学元件轴向间距测量[J]. 应用光学, 2021, 42(4): 698-702. DOI: 10.5768/JAO202142.0403001
引用本文: 宁悦文, 胡摇, 陶鑫, 郝群. 基于偏振衍射色散共焦的光学元件轴向间距测量[J]. 应用光学, 2021, 42(4): 698-702. DOI: 10.5768/JAO202142.0403001
NING Yuewen, HU Yao, TAO Xin, HAO Qun. Axial spacing measurement of optical elements based on polarization diffraction dispersion confocal method[J]. Journal of Applied Optics, 2021, 42(4): 698-702. DOI: 10.5768/JAO202142.0403001
Citation: NING Yuewen, HU Yao, TAO Xin, HAO Qun. Axial spacing measurement of optical elements based on polarization diffraction dispersion confocal method[J]. Journal of Applied Optics, 2021, 42(4): 698-702. DOI: 10.5768/JAO202142.0403001

基于偏振衍射色散共焦的光学元件轴向间距测量

Axial spacing measurement of optical elements based on polarization diffraction dispersion confocal method

  • 摘要: 光学元件轴向间距测量对精密光学系统的定位和装调具有重要意义。针对现有色散共焦测量系统中色散物镜结构复杂、色散范围小的问题,提出基于偏振衍射色散共焦的光学元件轴向间距测量方法,将传统折射共焦镜头几百毫米的轴向尺寸和复杂的装调需求简化为数毫米的单片镜,简化了系统结构。透镜间距和厚度测量实验表明,间距测量误差为10 μm。

     

    Abstract: The axial spacing measurement between optical elements is of great significance to the positioning and adjustment of precision optical systems. Aiming at the problems of complex dispersive objective lens structure and small dispersion range in the existing dispersion confocal measurement system, a method for measuring the axial spacing of optical elements based on the method of polarization diffraction dispersion confocal was proposed. The axial dimension of a traditional refractive confocal lens with a few hundred millimeters and the complex alignment requirements were simplified to a single-chip lens with a few millimeters, which simplified the system structure. The results of lens spacing and thickness measurement experiments show that the spacing measurement error is 10 μm.

     

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