陈壮壮, 王志斌, 李克武, 吴笑男. 基于PDMS薄膜的等离子体光栅仿真分析[J]. 应用光学, 2021, 42(2): 371-376. DOI: 10.5768/JAO202142.0208002
引用本文: 陈壮壮, 王志斌, 李克武, 吴笑男. 基于PDMS薄膜的等离子体光栅仿真分析[J]. 应用光学, 2021, 42(2): 371-376. DOI: 10.5768/JAO202142.0208002
CHEN Zhuangzhuang, WANG Zhibin, LI Kewu, WU Xiaonan. Simulation analysis of plasma grating based on PDMS thin films[J]. Journal of Applied Optics, 2021, 42(2): 371-376. DOI: 10.5768/JAO202142.0208002
Citation: CHEN Zhuangzhuang, WANG Zhibin, LI Kewu, WU Xiaonan. Simulation analysis of plasma grating based on PDMS thin films[J]. Journal of Applied Optics, 2021, 42(2): 371-376. DOI: 10.5768/JAO202142.0208002

基于PDMS薄膜的等离子体光栅仿真分析

Simulation analysis of plasma grating based on PDMS thin films

  • 摘要: 为了实现对等离子体光栅共振波长的测量,研究光栅参数对应力的响应敏感程度,提出了一种新型的应力敏感型聚二甲基硅氧烷(polydimethylsiloxane,PDMS)薄膜等离子体光栅。基于时域有限差分(finite difference time domain,FDTD)法的原理,构造了一种结构仿真模型,即周期性等离子体光栅模型。借助周期边界条件,通过对光栅施加应力,改变等离子体光栅参数(即周期、占空比及Au膜厚度)来实现共振波长的测量,研究光栅参数对应力的响应敏感程度。最后将仿真结果与理论数值作对比,并得出相对误差大小。仿真结果表明,当光栅周期p=0.7 μm,占空比f=55%,金膜厚度b=0.02 μm时,对应力的响应最敏感。其次,将仿真所得不同周期时的共振波长与理论值相比较,可知二者结果相吻合;周期为0.7 μm时,共振峰的波长为1.251 μm,仿真结果与理论数值比较得到,其相对误差都不超过2%,结果较为准确。此方法在单色仪、光谱仪和传感等领域中具有重要作用。

     

    Abstract: In order to realize the measurement of resonance wavelength of plasma grating, and research the response sensitivity of grating parameters to stress, a new type of stress-sensitive polydimethylsiloxane (PDMS) thin films plasma grating was proposed. Based on the principle of finite-difference-time-domain (FDTD) method, a structural simulation model, that is periodic plasma grating model was constructed. With the help of periodic boundary conditions and applying the stress on the grating, the resonance wavelength was measured by changing the plasma grating parameters, such as period, duty cycle and Au film thickness, and the response sensitivity of grating parameters to stress was studied. Finally, the simulated results were compared with the theoretical values, and the relative error was obtained. The simulated results show that when the grating period is 0.7 μm, the duty cycle is 55%, and the gold film thickness is 0.02 μm, the response to stress is most sensitive. Secondly, the resonance wavelength at different periods obtained by simulation is compared with the theoretical value, and the results are consistent; when the period is 0.7 μm, the wavelength of the resonance peak is 1.251 μm, and the relative error obtained by simulated results and theoretical values is less than 2%, which means the results are more accurate. This method plays an important role in the fields of monochromator, spectrometer, sensor, and so on.

     

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