单小琴, 韩志刚, 朱日宏. 基于波长移相剪切干涉的准直波前重构技术[J]. 应用光学, 2020, 41(1): 67-73. DOI: 10.5768/JAO202041.0102001
引用本文: 单小琴, 韩志刚, 朱日宏. 基于波长移相剪切干涉的准直波前重构技术[J]. 应用光学, 2020, 41(1): 67-73. DOI: 10.5768/JAO202041.0102001
SHAN Xiaoqin, HAN Zhigang, ZHU Rihong. Collimated wavefront reconstruction based on wavelength phase-shifting shear interferometry[J]. Journal of Applied Optics, 2020, 41(1): 67-73. DOI: 10.5768/JAO202041.0102001
Citation: SHAN Xiaoqin, HAN Zhigang, ZHU Rihong. Collimated wavefront reconstruction based on wavelength phase-shifting shear interferometry[J]. Journal of Applied Optics, 2020, 41(1): 67-73. DOI: 10.5768/JAO202041.0102001

基于波长移相剪切干涉的准直波前重构技术

Collimated wavefront reconstruction based on wavelength phase-shifting shear interferometry

  • 摘要: 为了实现干涉仪出射准直波前的重构,提出了基于波长调谐移相的横向剪切干涉技术。干涉仪出射波前分别经楔板的前后表面反射,通过角锥棱镜返回后在干涉仪CCD上形成剪切干涉条纹。采用波长移相方法提取剪切干涉条纹的相位信息从而实现准直波前重构。分析相对剪切比对波面重构精度的影响,推导相对剪切比和其影响因素间的关系公式,给出波长移相中光程差常数分量的估算方法。测量干涉仪的三组出射波前,波前的峰谷值分别为3.22λ、2.10λ、0.83λ。该方法简化了传统测量干涉仪准直波前的横向剪切干涉装置,提高了测量精度,特别适合于测量波长移相干涉仪的出射波前。

     

    Abstract: The lateral shearing interferometry based on wavelength phase-shifting is proposed to achieve the collimated wavefront reconstruction of an interferometer. The emergent wavefront of an interferometer is reflected by front and rear surfaces of a wedge respectively, and returns through a corner cube, forming shearing interferogram on the CCD of the interferometer. The wavelength phase-shifting method is used to extract the phase information of the shearing interference fringes to achieve the collimated wavefront reconstruction. The impact of the relative shear ratio on the accuracy of the wavefront reconstruction is analyzed and the relationship between the relative shear ratio and its influencing f actors is derived. The estimation method of the constant component of the OPD in wavelength phase-shifting is given. Three wavefronts have been measured and their PV (peak to valley) values are 3.22λ, 2.10λ and 0.83λ. This method simplifies traditional lateral shearing measurement of collimated wavefront and improves the measurement accuracy. It is particularly suitable for measuring emergent wavefront of wavelength phase-shifting interferometers.

     

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