龚五林, 李占锋, 刘泉澄, 邓琥, 武志翔. 太赫兹飞行时间测厚法在大气环境中的应用[J]. 应用光学, 2023, 44(4): 809-815. DOI: 10.5768/JAO202344.0403001
引用本文: 龚五林, 李占锋, 刘泉澄, 邓琥, 武志翔. 太赫兹飞行时间测厚法在大气环境中的应用[J]. 应用光学, 2023, 44(4): 809-815. DOI: 10.5768/JAO202344.0403001
GONG Wulin, LI Zhanfeng, LIU Quancheng, DENG Hu, WU Zhixiang. Applications of thickness measurement method based on terahertz time-of-flight in atmospheric environment[J]. Journal of Applied Optics, 2023, 44(4): 809-815. DOI: 10.5768/JAO202344.0403001
Citation: GONG Wulin, LI Zhanfeng, LIU Quancheng, DENG Hu, WU Zhixiang. Applications of thickness measurement method based on terahertz time-of-flight in atmospheric environment[J]. Journal of Applied Optics, 2023, 44(4): 809-815. DOI: 10.5768/JAO202344.0403001

太赫兹飞行时间测厚法在大气环境中的应用

Applications of thickness measurement method based on terahertz time-of-flight in atmospheric environment

  • 摘要: 太赫兹飞行时间(terahertz time-of-flight,THz-TOF)法具有快速、无损、高精度等优点,是厚度检测领域的新型发展方向。然而大气环境中水蒸气对太赫兹波存在较强的吸收,限制了THz-TOF法在大气环境中的应用。分析了THz-TOF法中太赫兹波在大气环境中的传播机理;提出了一种基于吸收模型的水蒸气消除方法;以两种塑料板样品为对象开展了应用研究。通过和干燥环境中测量的结果进行对比,结果表明:该方法能够有效消除水蒸气的干扰,实现大气环境中材料厚度和折射率的准确测量。

     

    Abstract: Terahertz time-of-flight (THz-TOF) method is a new development direction in the field of thickness measurement, which has the advantages of fast, non-destructive and high precision. However, the water vapor in atmospheric environment has strong absorption of terahertz wave, which limits the application of THz-TOF method in atmospheric environment. The propagation mechanism of terahertz wave in atmospheric environment in THz-TOF method was firstly analyzed, and then a method of water vapor elimination based on absorption model was proposed. Finally, two kinds of plastic plate samples were used as the object of application research. By comparing with the measurement results in dry environment, the results show that the method can effectively eliminate the interference of water vapor and realize the accurate measurement of material thickness and refractive index in atmospheric environment.

     

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