王中宇, 王倩, 孟浩, 王雪. 基于无衍射光的表面粗糙度三角测量及其灰色评定方法[J]. 应用光学, 2011, 32(5): 909-912.
引用本文: 王中宇, 王倩, 孟浩, 王雪. 基于无衍射光的表面粗糙度三角测量及其灰色评定方法[J]. 应用光学, 2011, 32(5): 909-912.
WANG Zhong-yu, WANG Qian, MENG Hao, WANG Xue. Surface roughness measurement based on non-diffracting beamtriangulation and grey evaluation[J]. Journal of Applied Optics, 2011, 32(5): 909-912.
Citation: WANG Zhong-yu, WANG Qian, MENG Hao, WANG Xue. Surface roughness measurement based on non-diffracting beamtriangulation and grey evaluation[J]. Journal of Applied Optics, 2011, 32(5): 909-912.

基于无衍射光的表面粗糙度三角测量及其灰色评定方法

Surface roughness measurement based on non-diffracting beamtriangulation and grey evaluation

  • 摘要: 激光三角法是表面形貌非接触测量中的一种常用方法,在几何测量领域应用广泛。传统的激光三角法采用高斯光束作为指示光源,在机械扫描机构的配合下,通过对被测表面逐点扫描完成表面形貌的测量。采用新型的无衍射光替代传统激光光源,解决了普通高斯光束存在的焦深问题,简化了机械结构。并采用基于灰色系统理论的灰色滤波进行表面形貌的分离与评定,克服了原有方法对测量数据样本量和统计特性的依赖,并通过实验表明该系统能够准确地完成表面形貌的三维测量,所提出的灰色评定方法能够比较有效地进行表面形貌的分离与评定。

     

    Abstract: Laser triangulation method is normally used in the non-contact precision measurement of surface topography due to its simplicity and robustness. In the traditional laser triangulation method, a Gaussian beam is used to scan the measured surface point-by-point. Since data collecting is completed with point scanning, a large number of measurements are needed to obtain the surface topography of the whole surface. Taking non-diffracting light as the incident light of the laser triangulation measurement system, the non-contact precision measurement for surface roughness is fulfilled with a higher speed and it solves the focal depth problem of the Gaussian beam. The evaluation method of the surface roughness based on the grey filtering overcomes the shortages of the existing evaluation methods and is complementary to Gaussian filtering method. The measurement results show that the system measures the surface roughness accurately and the proposed grey evaluation method is effective.

     

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