刘术林, 邓广绪, 毛加明. 用气熔压工艺改善6μmMCP的空间结构和视场清晰度[J]. 应用光学, 2005, 26(4): 22-25.
引用本文: 刘术林, 邓广绪, 毛加明. 用气熔压工艺改善6μmMCP的空间结构和视场清晰度[J]. 应用光学, 2005, 26(4): 22-25.
LIU Shu-lin, DENG Guang-xu, MAO Jiaming. Improvement of Space Construction and FOV Definition of MCP with Small Aperture by Gas Sinter Technology[J]. Journal of Applied Optics, 2005, 26(4): 22-25.
Citation: LIU Shu-lin, DENG Guang-xu, MAO Jiaming. Improvement of Space Construction and FOV Definition of MCP with Small Aperture by Gas Sinter Technology[J]. Journal of Applied Optics, 2005, 26(4): 22-25.

用气熔压工艺改善6μmMCP的空间结构和视场清晰度

Improvement of Space Construction and FOV Definition of MCP with Small Aperture by Gas Sinter Technology

  • 摘要: 高分辨率微光像增强器对微通道板(MCP)的孔径、空间结构和视场清晰度有着极为严格的技术要求。我们在引进的气熔压设备上,通过对压力、温度、保温保压时间等相互制约的工艺参数进行大量实验,已探索出孔径为6μm、孔间距为8μm的MCP的最佳工艺,即第一平台温度为500℃左右、熔压温度为560~590℃、压力为0.5~0.9Mpa,保温保压时间为60min左右。在光学显微镜和扫描电子显微镜下观察我们制作的MCP,发现复丝排列规整、边界相邻的两排单丝变形较小且排列有序、复丝顶角无畸变(即无扭曲、梅花丝、孔洞、错位)。与Photonis公司同种型号的MCP相比,我们制作的MCP的梅花丝少1/3左右。在标准输入下,我们的MCP增益比较高,增益均匀性有所改善,固定图像噪声在0~1级,视场清晰度得到了较大程度的提高。

     

    Abstract: Image intensifiers with high resolution are strict with the pore, space construction and FOV definition of microchannel plate (MCP) with a large number of experiments, we extended progress in the MCP making technique and then fabricated some MCPs whose pores are 6μm and pitches are 8μm. Comparing our MCPs with the MCPs delivered by Photonis Company, we found the rosettes in our MCPs are less than the ones in theirs. In the case of standard input(10-11A/cm2), the gain of MCP is high, the uniformity of gain is improved, the fixedpattern noise is in the level of 0~1, the definition of FOV is high.

     

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