魏国军, 周小红, 周雷, 陈林森. 低空频模板实现微光变图像的激光直写方法[J]. 应用光学, 2007, 28(6): 742-745.
引用本文: 魏国军, 周小红, 周雷, 陈林森. 低空频模板实现微光变图像的激光直写方法[J]. 应用光学, 2007, 28(6): 742-745.
WEI Guo-jun, ZHOU Xiao-hong, ZHOU Lei, CHEN Lin-sen. Laser direct writing of micro-OVD with low frequency templates[J]. Journal of Applied Optics, 2007, 28(6): 742-745.
Citation: WEI Guo-jun, ZHOU Xiao-hong, ZHOU Lei, CHEN Lin-sen. Laser direct writing of micro-OVD with low frequency templates[J]. Journal of Applied Optics, 2007, 28(6): 742-745.

低空频模板实现微光变图像的激光直写方法

Laser direct writing of micro-OVD with low frequency templates

  • 摘要: 提出一种采用低空频模板实现微光变图像(micro-optical variable device)的激光直写方法。低空频模版由6×6个不同取向线条状单元图形构成,单元图形由空间光调制器输入,经精缩投影光学系统缩微,在光刻胶面上逐单元曝光。控制单元图形的结构取向能够实现各种复杂设计和特性的微光变图像。在低频光栅模板的基础上,给出了定向散斑结构输入模板的设计方法,它可进一步改进图像的非彩色效果。采用自行研制的SVG-LDW04型激光直写系统制作了微光变图像,其结构特征线度为4μm~100μm。该方法无需机械旋转机构,为实现微光变图像提供了一种便捷有效的手段。

     

    Abstract: A laser direct writing way of micro-optical variable device with low frequency templates is proposed. The template is composed of 6×6 unit figures. The unit structure on the template is inputted by the spatial light modulator (SLM), exposed on photo-resist plate through the projection optical system section by section. micro-OVD with various complicated design and characteristics can be made by controlling the direction of the unit structure on the template. In order to achieve the achromatic effect of micro-OVD, a directional random speckle structure template base on the low frequency template was designed. The SVG-LDW04 laser direct writing system, whose typical phase structure is (4~100) microns, is adopted to fabricate the micro-OVD. The mentioned method does not use mechanical rotation device to change the direction of unit template, provides a novel and convenient way to fabricate the micro-OVD′s.

     

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