郭文静, 石兵华, 金永. 关于提高傅里叶变换轮廓术测量精度的研究[J]. 应用光学, 2013, 34(5): 845-848.
引用本文: 郭文静, 石兵华, 金永. 关于提高傅里叶变换轮廓术测量精度的研究[J]. 应用光学, 2013, 34(5): 845-848.
GUO Wen-jing, SHI Bing-hua, JIN Yong. Measurement accuracy improvement of Fourier transform profilometry[J]. Journal of Applied Optics, 2013, 34(5): 845-848.
Citation: GUO Wen-jing, SHI Bing-hua, JIN Yong. Measurement accuracy improvement of Fourier transform profilometry[J]. Journal of Applied Optics, 2013, 34(5): 845-848.

关于提高傅里叶变换轮廓术测量精度的研究

Measurement accuracy improvement of Fourier transform profilometry

  • 摘要: 针对傅里叶变换轮廓术在实际测量中容易受到光学成像系统和计算方法的影响而使得测量结果不精确的现象,提出基于最小二乘法的条纹图像预处理技术,并讨论了滤波器的设计、相位展开的方法及系统标定模型对测量结果的影响。实验表明,改进后的方法其测量误差在2%以内。

     

    Abstract: During the actual measurement, the accuracy of Fourier transform profilometry (FTP) is vulnerable to the hardware and calculation methods, the fringe image preprocessing technique is proposed based on the least square method. The filter design, the phase unwrapping algorithm and influence of system calibration model on the measurement results are discussed. The result shows that, this improved FTP can reduce the errors, which are caused by the sampling shortage, spectrum leakage, spectrum aliasing, phase wrapping and system calibration. The measurement error of the improved method can be controlled within 2%.

     

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