XIAO Guang-hui, QIN Hai, LAN He, YE Jian, YANG Ming-sheng, PAN Long-fa. Laser scribing system for a-Si thin film solar cell preparation[J]. Journal of Applied Optics, 2011, 32(5): 1016-1021.
Citation: XIAO Guang-hui, QIN Hai, LAN He, YE Jian, YANG Ming-sheng, PAN Long-fa. Laser scribing system for a-Si thin film solar cell preparation[J]. Journal of Applied Optics, 2011, 32(5): 1016-1021.

Laser scribing system for a-Si thin film solar cell preparation

More Information
  • The laser scribing process for a-Si (amorphous silicon) thin film solar cell preparation requires the line width of 30 m~50 m, the dead zone of less than 300 m in size, and the compliance of line depth with the process requirements. Thus, the high beam quality of the laser is required, as well as the high imaging quality and wide focal depth of the optical system. A laser scribing system with a single laser and fourway light splitters was designed. With the designed laser scriber, a laser scribing test was done on a 1 400 mm1 100 mm3.2 mm glass substrate. The widths of the scribing lines P1, P2 and P3 were 35 m, 50 m and 45 m, respectively, the dead zone (distance between P1 and P3) was 287 m, and their final depths were 0.98 m, 0.24 m and 0.58 m respectively. The results show that the widths and depths of the scribing lines meet the requirements of thin film solar cell preparation process.
  • [1]薛俊明, 麦耀华, 赵颖, 等. 薄膜非晶硅/微晶硅叠层太阳电池的研究[J]. 太阳能学报, 2005, 26(2): 166-169.

    XUE Jun-ming, MAI Yao-hua, ZHAO Ying, et al. Investigation on a-Si/uc-Si tandem solar cells[J]. Acta Energiae Solaris Sinica, 2005, 26(2): 166-169. (in Chinese with an English abstract)

    [2]钟迪生. 硅薄膜太阳能电池研究的进展[J]. 应用光学, 2001, 22(3): 34-40.

    ZHONG Di-sheng. Research progress in solar Si thin films[J]. Journal of Applied Optics, 2001, 22(3): 34-40. (in Chinese with an English abstract)

    [3]SHAH A V, SCHADE H, VANECEK M, et al. Thin-film silicon solar cell technology[J]. Progress in Photovoltaics: Research and Applications, 2004, 12(2/3): 113-142.

    [4]章诗, 王小平, 王丽军, 等. 薄膜太阳能电池的研究进展[J]. 材料导报, 2010, 24(5): 126-131.

    ZHANG Shi, WANG Xiao-ping, WANG Li-jun, et al. Research progress in thin film solar cells[J]. Materials Review, 2010, 24(5): 126-131. (in Chinese with an English abstract)

    [5]PERNET P, GOETZ M, NIQUILL X, et al. Front contact and series connection problems of a-Si:H solar cells on polymer film substrates[C]. Switzerland: Proceedings of the 2nd World Conference Photovoltaic Energy Conversion, 1998: 976-979.

    [6]王颂锋, 殷志刚. 非晶硅太阳能电池效率衰减机制的分析[J]. 新能源, 1997, 19(5): 35-37.

    WANG Song-feng, YIN Zhi-gang. Analysis on the mechanism of efficiency degradation of amorphous silicon solar cell array[J]. New Energy, 1997, 19(5): 35-37. (in Chinese with an English abstract)
  • Related Articles

    [1]ZHANG Liwei, CHEN Haobo, BAO Haiyu, WU Xingzhi, SUN Wenqing, WU Quanying. Spatiotemporal phase-shifting method for interferograms of apertures with arbitrary shape[J]. Journal of Applied Optics, 2023, 44(5): 1080-1087. DOI: 10.5768/JAO202344.0503004
    [2]CAI Yawen, ZHANG Qingjun, LIU Jie, ZHANG Yue, LIU Jiuli. Multi-degree of freedom acquisition system based on wide-spectrum phase-shifting interferometry[J]. Journal of Applied Optics, 2021, 42(5): 775-781. DOI: 10.5768/JAO202142.0501003
    [3]XU Junyi, YUAN Qun, GAO Zhishan, XU Yao. Profile measurement of red blood cells based on simultaneous phase-shifting microscopic interference[J]. Journal of Applied Optics, 2020, 41(5): 1020-1025. DOI: 10.5768/JAO202041.0503003
    [4]YU Zihao, LIU Jin, YANG Haima, LI Meiying, XU Wei, XU Bin. Research on 3D measurement and reconstruction of high-precision profile of multi-frequency grating object[J]. Journal of Applied Optics, 2020, 41(3): 580-585. DOI: 10.5768/JAO202041.0303006
    [5]WANG Lin, HAN Xu, FU Yanjun, HUANG Chunzhi, SHI Yaoqun. Fast phase unwrapping algorithm for 3D measurement[J]. Journal of Applied Optics, 2019, 40(2): 271-277. DOI: 10.5768/JAO201940.0202005
    [6]Qiu Lei, Qian Bin, Fu Yanjun, Zhong Kejun. Three-dimensional shape measurement method based on sinusoidal and triangular fringe projection[J]. Journal of Applied Optics, 2018, 39(4): 522-527. DOI: 10.5768/JAO201839.0403002
    [7]Zeng Zhuohuan, Huang Chao, Qu Guoli, Fu Yanjun. 3D measurement method based on binary fringe plusphase coding fringe defocus projection[J]. Journal of Applied Optics, 2017, 38(5): 790-797. DOI: 10.5768/JAO201738.0503003
    [8]Shang Zhong-yi, Li Wei-xian, Dong Ming-li, Duan Liang-jun. 3D shape measurement system based on fringe projection in 4-step phase shifting[J]. Journal of Applied Optics, 2015, 36(4): 584-589. DOI: 10.5768/JAO201536.0403005
    [9]SHI Yi-lei, SU Jun-hong, YANG Li-hong, XU Jun-qi. Measuring thin-film thickness with phase-shift interferometry[J]. Journal of Applied Optics, 2009, 30(1): 76-79.
    [10]ZHU Ri-hong, CHEN Lei, WANG Qing, GAO Zhi-shan, HE Yong. Phase shift interferometry and its application[J]. Journal of Applied Optics, 2006, 27(2): 85-88.

Catalog

    Article views (3275) PDF downloads (742) Cited by()

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return