WANG Zhong-yu, WANG Qian, MENG Hao, WANG Xue. Surface roughness measurement based on non-diffracting beamtriangulation and grey evaluation[J]. Journal of Applied Optics, 2011, 32(5): 909-912.
Citation: WANG Zhong-yu, WANG Qian, MENG Hao, WANG Xue. Surface roughness measurement based on non-diffracting beamtriangulation and grey evaluation[J]. Journal of Applied Optics, 2011, 32(5): 909-912.
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Surface roughness measurement based on non-diffracting beamtriangulation and grey evaluation

  • 1.

    State Key of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084;

  • 2.

    School of Instrumentation Science &Opto-Electronics Engineering,Beihang University,Beijing 100191

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  • Laser triangulation method is normally used in the non-contact precision measurement of surface topography due to its simplicity and robustness. In the traditional laser triangulation method, a Gaussian beam is used to scan the measured surface point-by-point. Since data collecting is completed with point scanning, a large number of measurements are needed to obtain the surface topography of the whole surface. Taking non-diffracting light as the incident light of the laser triangulation measurement system, the non-contact precision measurement for surface roughness is fulfilled with a higher speed and it solves the focal depth problem of the Gaussian beam. The evaluation method of the surface roughness based on the grey filtering overcomes the shortages of the existing evaluation methods and is complementary to Gaussian filtering method. The measurement results show that the system measures the surface roughness accurately and the proposed grey evaluation method is effective.
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  • ［1］冯俊艳,冯其波,匡萃方. 高精度激光三角位移传感器的技术现状［J］应用光学, 2004,25(03)：33-36

    FENG Jun-yan, FENG Qi-bo, KUANG Cui-fang. Present status of high precision laser displacement sensor based on triangulation ［J］. Journal of Applied Optics, 2004,25(03)：33-36.(in Chinese with an English abstract)

    ［2］张耕培, 崔长彩. 小波滤波在表面形貌评定和分析中的应用［J］ 华侨大学学报（自然科学版）, 2010, 31(2):141-142.

    ZAHNG Geng-pei, CUI Chang-cai. Surface morphology evaluation and analysis based on wavelet filtering ［J］. Journal of Huaqiao University (Natural Science), 2010, 31(2):141-142.(in Chinese with an English abstract)

    ［3］DURNIN J. Exact solutions for nondiffracting beams: the scalar theory［J］. J Opt Soc Am, 1987, 4(1): 651-654.

    ［4］COX A J, DIBBLE D C. Non-diffracting beam from a spatially filtered fabryperot resonator［J］. J Opt Soc Am, 1994, 1(9): 282-286.

    ［5］WANG Zhong-yu, MENG Hao, FU Ji-hua. Method for extracting bessel structured light fringes- center lines in a triangulation measurement system［J］. Optics & Laser Technology, 2009, 41: 809-814.

    ［6］MENG Hao, WANG Zhong-yu, FU Ji-hua. Grey signal processing and data reconstruction in the non-diffracting beam triangulation measurement system［J］. SPIE, 2008, 7130: 71304M1-71304M6.

    ［7］WANG Zhong-yu, MENG Hao. Novel method for evaluating surface roughness by grey dynamic filtering［J］. Measurement,2010,43:78-82.
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