Ion beam figuring technology

DAI Yi-fan, ZHOU Lin, XIE Xu-hui, LIAO Wen-lin, SHEN Yong-xiang. Ion beam figuring technology[J]. Journal of Applied Optics, 2011, 32(4): 753-760.

Citation:

DAI Yi-fan, ZHOU Lin, XIE Xu-hui, LIAO Wen-lin, SHEN Yong-xiang. Ion beam figuring technology[J]. Journal of Applied Optics, 2011, 32(4): 753-760.

Citation:

DAI Yi-fan, ZHOU Lin, XIE Xu-hui, LIAO Wen-lin, SHEN Yong-xiang. Ion beam figuring technology[J]. Journal of Applied Optics, 2011, 32(4): 753-760.

Abstract

The ion beam figuring (IBF) technology is widely used for precision and deterministic process. This paper introduced the principles and characteristics of IBF, described its development status at home and abroad, summarized the research focus of IBF such as the technology to control the mid-high spatial frequency error, the algorithm to solve dwell time, and the processing technique.

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