Analysis and processing of field curvature without astigmatism based on diffraction theory

An intensity distribution integration formula of the image point only with field curvature is obtained from diffraction image, and an analysis formula is given to provide the deviation error of image plane from Gaussian plane. Simulation experiments were conducted, and the field curvature without astigmatism and its image points were discussed. The three dimensional shape map, Strehl ratio and field curvature correction by inverse filtering were analyzed.