ZHOU Xiao-shan, LI Yan. Absolute distance measurement by combining phase distance meter and heterodyne interferometer[J]. Journal of Applied Optics, 2010, 31(6): 1013-1017.
Citation: ZHOU Xiao-shan, LI Yan. Absolute distance measurement by combining phase distance meter and heterodyne interferometer[J]. Journal of Applied Optics, 2010, 31(6): 1013-1017.
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Absolute distance measurement by combining phase distance meter and heterodyne interferometer

  • State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China

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    • Abstract
  • To overcome the shortcomings of limited range and low precision in conventional absolute distance measurement, a new method is introduced by combining phase distance meter and heterodyne interferometer using He-Ne laser in dual longitudinal modes. The phase distance meter is used for coarse measurement and the heterodyne interferometer using He-Ne laser in dual longitudinal modes is used for accurate measurement. The result depends on the reliable combination of the two methods. A measurement system was built to verify the feasibility of this method and the sources of measurement error were analyzed. The comparison experiment was made against dual-frequency laser interferometer. The result shows that the system achieves the expected accuracy and its standard deviation is better than 1mm, which meets the large-scale measurement requirement.
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