ZHANG Rui-zhi, FU Xiu-hua, MU Guang-yuan, TANG Ji-long. Development of 254nm low-pass filter[J]. Journal of Applied Optics, 2010, 31(2): 317-321.
Citation: ZHANG Rui-zhi, FU Xiu-hua, MU Guang-yuan, TANG Ji-long. Development of 254nm low-pass filter[J]. Journal of Applied Optics, 2010, 31(2): 317-321.
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Development of 254nm low-pass filter

  • Changchun University of Science and Technology,Changchun 130022,China

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  • According to the designed requirements of UV systems, a low-pass filter was studied and developed on K9 glass substrates with high reflectivity at 254nm and high transmittance in visible spectrum. According to the film designed theory, low-pass interference filter film was obtained by optimizing Needle method. The electron-beam evaporation materials of HfO2 and MgF2 were studied. The splash was solved and the absorption was decreased. By using Kaufman ion source, the film density was improved, the drift of spectral curves was solved and the quality of the film was improved by optimizing the process parameters.
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    LIN Yong-chang, GU Yong-lin, ZHANG Cheng, et al. Needle method and initial coating design［J］. Acta Optica Sinica, 1999,19(10):1433-1436. (in Chinese with an English abstract)
    ［6］李守中,杨益民,黄良甫,等.考夫曼型离子源工作稳定性研究［J］.光学仪器, 1999,21(4-5):44-46.
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