Investigation of interferogram pre-processing
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Graphical Abstract
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Abstract
The modern interferometry measurment features high precision and non-contact, which makes it widely used. As an essential part of the measruement, apre-processing of interferogram was proposed, and it included edge identification based on mathematical morphology, regional extension based on 2D fast fourier transformation (FFT), as well as unwrapped and wrapped phase based on non-weighted least square method for discrete cosine transform (DCT). At last, surface distribution was obtained. The image aquisition of the SiO2 film and the preprocessing of interferogram was performed.The result indicates that it is consistent with the result measured by Zygo interferometer.
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