Optimal design of 3-D superresolution pupil filter

Three-zone amplitude-type superresolution pupil filters (1-0-1) and three-zone phase-type superresolution pupil filters (-0-) are designed with Matlab optimization toolbox and non-linear programming. The optimal model is established and some examples of optimization are given. The optimization results show the both filters have preferable 3-D superresolution characteristics, the axial resolution is better than transverse resolution, and the phase-type resolution is better than amplitude-type resolution at the same Strehl ratio. The structures of the both filters are simple and easy to be implemented.