Design of white-light interference micro/nano scanning system controlled by SPCE061A

Aiming at the hysteresis property of PZT under small thrust, a novel design of a white-light interference micro-displacement scanning system controlled by SPCE061A MCU is proposed. The micro-displacement scanning system taking a low-voltage error magnifier OP07 and a high-voltage power amplifier PA78 as the key elements of voltage stabilizer, made the overall bandwidth and magnification adjustable. The mathematical modeling for the hysteresis curve of micro-displacement of PZT in the scanning system was carried out with the least square fitting method. The experimental results show that the output voltage can be continuously adjustable from 0 to 200V, the maximum value of the ripple voltage is 1.06mV, the total displacement of 20and the linearity of 0.9 can be obtained when applied to the micro/nano scanning control, and the system has step-response time of 1.5s and the control accuracy of 10nm，which can realize the precise and rapid open-loop control for micro/nano scanning system.