Elimination method of adjustment error in measurement of aspheric optical elements
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Abstract
The aberration of aspherical optical systems were measured, analyzed and calculated with Zygo universal laser interferometer, and the adjustment error coursed by adjustment imperfectness of aspherical optical systems was confirmed, so as to solve the problems appearing during the measurement process of aspherical optical elements. The adjusting direction and magnitude in assembly and adjustment process were calculated with a method of optimization design based on the relationship between the aberration and assembling errors, and then the aspherical optical systems were adjusted with the method. The experimental results show that the repeatability of the method is ideal. The typical adjustment accuracy of this method is 1/10 of the wavelength.
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