YANG Zhao-jin, WANG Lei, LI Gao-ping, XU Rong-guo. Explanation of verification procedure for tester of optical film refractive index and thickness[J]. Journal of Applied Optics, 2007, 28(4): 517-519.
Citation: YANG Zhao-jin, WANG Lei, LI Gao-ping, XU Rong-guo. Explanation of verification procedure for tester of optical film refractive index and thickness[J]. Journal of Applied Optics, 2007, 28(4): 517-519.
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Explanation of verification procedure for tester of optical film refractive index and thickness

  • Xi′an Institute of Applied Optics,Xi′an 710065,China

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    YANG Zhao-jin

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    • Abstract
  • The content of the verification procedure for testers of optical film refractive index and thickness is described. The specifications of the instrument under test, the main verification parameters and the verification method are introduced. The procedure applies to the instruments measuring the optical film refractive index and thickness by means of spectrum ellipsometry method. It has a great potential in development, production and application of optical film.
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