LIU Xiong-fei, ZHANG De-heng, QI Hai-bing. Influence of chemistry structure of FDLC film on optical property[J]. Journal of Applied Optics, 2007, 28(1): 51-54.
Citation: LIU Xiong-fei, ZHANG De-heng, QI Hai-bing. Influence of chemistry structure of FDLC film on optical property[J]. Journal of Applied Optics, 2007, 28(1): 51-54.

Influence of chemistry structure of FDLC film on optical property

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  • Corresponding author:

    ZHANG De-heng

  • In order to study the influence of chemistry structure of FDLC film on optical property, the fluorinated diamond-like carbon(FDLC) films were deposited on the glass substrate with the method of PECVD, and analyzed by AES, FTIR and UV-VIS. The result shows that the deposited films are typical diamond-like structure and the fluorine in the films exists in the form of C-F2 key; the content of C-F2, increases in the first period and then reduces as the temperature continuously rises in the deposition process; the sp3 content of FDLC films decreases and the sp2 content increases when the fluorine content increases; the optical band gap has a close relationship with the content of sp2 key, and the more the sp2 content is, the smaller the optical band gap will be.

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