Explanation of calibration specification for digital laser plane interferometer

Digital laser plane interferometer is used to measure the surface of optical components and the wavefront aberration of non-confocal optical system. In order to unify digital laser interferometer measurement values,and guarantee the accuracy and traceability of the measured results, the digital laser interferometer calibration standard was laid down. The constitution of the calibration specification for digital laser plane interferometer is introduced. The specifications for the instruments under test, the main calibration parameters and the calibration method are described.