Research on Infrared Ultrawideband Beam Splitter

Ultra-wideband spectroscope is an indispensable optical component in spectral analysis system, and its performance directly affects the measurement accuracy of Fourier infrared spectrometer. Based on the optical film theory, Ge, ZnSe and YbF₃ were selected as coating materials, combined with the actual spectrum curve of the substrate, through the spectral compensation design method, combined with TFC software to complete the film system design. The electron beam evaporation and ion beam assisted deposition technology was used to prepare the thin film. Through the optimization of the deposition process, the problem of poor Spectrum caused by large film thickness control error during the preparation of the spectroscope was solved. The Spectrum Two Fourier infrared spectrometer was used to detect that the average spectral ratio of 2.5 μm～20 μm band was 52:45.5 at 45°incidence. Through the environmental test, the spectroscope has good stability.