Wavefront detection technology based on Shark-Hartmann theory

Precise wavefront detection is an important basis for reflection mirror figure test and wavefront distortion measurement. According to the theory of SharkHartmann, the wavefront detecting technique was studied by simulation and experiments. The spherical wave/cylindrical wave, formated by the parallel lights transmitting through the spherical lens/cylindrical lens, were detected as the wavefronts. In experiment the commercial microlens array and charge coupled device (CCD) were utilized to build the Shark-Hartmann sensor, and the actual light beam was used as a reference to avoid the influence of the optical alignment error on system. The simulated calculation results show that the mean curvature error is 13.423 mm, and the experimental results indicate that the spherical/cylindrical/tilt wave detection and recovery can be realized.