Study of ultraviolet optical transfer function measurement equipment

The optical transfer function (OTF) is an important parameter of image quality for optical system. As modern OTF measurement equipments just covered visible light and infrared band, the ultraviolet OTF (260 nm~400 nm) measurement equipment was designed. The theory and the components of the testing equipment were introduced. The equipment was calibrated by the OTF standard lens with centric wavelengths of 300 nm and 380 nm. The results show that the errors between theory and measurement of MTF are 0.03 (on-axis) and 0.05 (off-axis). Finally, the uncertainty of equipment measurement is evaluated.