Surface inspection and evaluation of ellipsoidal mirror using 3D scanning

By using 3D scanning detection method, we measured the surface of ellipsoidal reflector and performed the best fitting contrast with the standard ellipsoidal suface-taking E210 reflector as an example. The result shows that the 3D scan detection method is capable of ellipsoidal reflector inspection, and the E210 ellipsoidal reflector is processed excessively on the bottom and insufficiently on the top in an approximate shape like cross. The processing error is -0.06 mm~+0.08 mm, which meets the limited profile error range of -0.1 mm~+0.1 mm. We carried out the reverse calculation according to the scanned point cloud data and established an actual reflection surface model, moreover, further simulation of reflector parameters, such as reflecting spot shape and size, was accomplished. The simulation results correspond well to the test result.