Ultra-smooth surface processing method of wedge mirrorwith double-symmetric angle

A new processing method of wedge mirror with double-symmetric angle which has two ultra-smooth surfaces was presented. According to the characteristics of the optical elements, the traditional processing method was improved. The elements were processed by using the way of wedge plate combination tooling and bonding. The flaw, figure, roughness and consistency of optical surface were greatly improved. The root mean square (RMS) roughness of ultra-smooth surface was always better than 0.2 nm (AFM measurement), the surface defect reached 0 level, the angle precision was 15, and the qualification ratio under first acceptance check was above 85%. This method can effectively solve the bottleneck problem in production.