Micro-displacement measurement based on comparison of interference fringe

The experiment on micro-displacement measurement based on the comparison of Michelson interferometer fringe was introduced. The beam path of optical interference was composed with He-Ne laser, mirrors and beam splitter. The reflector was fixed on the surface of measured object, it was moving with the object to make the interference fringes changing. The changing interference fringes were captured by using the linear charged coupled device (CCD). After image calculation by using the comparison of sequence image, the micro-displacement of measured object was obtained. Experiment shows that the method of image sequence comparison to measure micro-displacement is feasible. The measurement accuracy can reach micrometer.