Nanometrology technology in precision measurement

With the rapid development of nanometer science, there will be much higher standard on nanometrology technology. So far, the uncertainty of measurement can be realized sub-nanometer and even picometer in the range of dozens of micrometers. The current main technologies used in nanometrology have been reviewed, which include the laser interferometer, beat frequency F-P interferometer, X-ray interferometer, optical and X-ray interferometer, frequency measuring system and optical frequency comb technology.