Calibration method of center deviation measurement errors of optical center deviation measuring instrument

The optical center deviation measuring instrument is a high-precision optical testing device mainly used in the bonding, assembly and automatic detection processes of optical systems, and its measurement accuracy is mainly determined by the errors of its center deviation measurement. A calibration method for the center deviation measurement errors of an optical center deviation measuring instrument was introduced. By analyzing the transmission and reflection measurement principles of the optical center deviation measuring instrument, a standard hemisphere and an inductive micrometer were designed as the transmission equipment to achieve calibration and traceability of the center deviation measurement errors of the optical center deviation measuring instrument. Finally, calibration was performed on an OptiCentric center deviation measuring instrument. The calibration results show that the repeatability of center deviation measurement is better than 0.03 μm, and the expanded uncertainty U is 0.12 μm (k=2). The research results show that using this calibration method can effectively transfer the measurement errors of optical center deviation measuring instrument, and the equipment used in this calibration method is relatively mature, easy to operate, able to form a complete traceability relationship, which has good application prospects.