| Citation: |
HE Zebin, CHEN Chang, YANG Junsheng, et al. Detection of pollution defects in integrated circuit chips using short-wave infrared polarization imaging[J]. Journal of Applied Optics, 2025, 46（2）: 388-394. DOI: 10.5768/JAO202546.0203004
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Aiming at the demands of high-speed and high-precision detection of pollution defects in integrated circuit chips, a high-precision and short-wave infrared polarization micro-imaging system based on the combination of short-wave infrared micro-imaging technology and polarization measurement technology was designed and developed. The detection light source transmitted through the sample, and the polarized light of the sample was collected by the microscope and incident on the polarization analysis device composed of wave plate and polarization detector to complete the measurement of the polarized image of the sample. Then the polarized image fusion technology was used to fuse the measured images to complete the feature extraction of the polarized image of the sample, thus achieving defect detection of integrated circuit chip contamination. The edge and center of the chip were tested with Op-Amp integrated chip. The results show that the defect characteristics tested by this system are clear and the quantity is complete, which can provide important basis to ensure the accuracy of integrated circuit chip contamination defect detection.
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