| Citation: |
YANG Weibin, WANG Chunyan, ZHANG Weiguo, et al. Method of detecting microlens wavefront by Hartmann sensor[J]. Journal of Applied Optics, 2025, 46（2）: 380-387. DOI: 10.5768/JAO202546.0203003
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With the wide application of microlens, the rapid detection of optical properties of microlens is a key problem to be solved urgently by users and processors. Hartmann wavefront sensor was used to detect the wavefront of microlens and to quickly characterize its optical properties. In order to verify the feasibility of this method, the overall scheme of measuring microlens wavefront with Hartmann sensor was designed, the measurement experiment system was set up, and the measurement error source was analyzed. Combined with the experimental scheme, the centroid extraction algorithm and the Zernike polynomial wavefront reconstruction algorithm were studied to ensure the centroid extraction accuracy and wavefront reconstruction accuracy of the spot, and the effect of aperture diffraction of the lens to be tested on the wavefront detection accuracy was analyzed. The wavefront error and primary aberration information of a 200 μm convex lens were obtained, which provided a new idea for the rapid detection of optical properties of microlenses.
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