HAN Manlin, HAN Sen, WU Quanying, et al. Improved double-pass measurement method for detecting right-angle errors of corner cube prisms[J]. Journal of Applied Optics, 2025, 46(1): 148-155. DOI: 10.5768/JAO202546.0103004
Citation: HAN Manlin, HAN Sen, WU Quanying, et al. Improved double-pass measurement method for detecting right-angle errors of corner cube prisms[J]. Journal of Applied Optics, 2025, 46(1): 148-155. DOI: 10.5768/JAO202546.0103004

Improved double-pass measurement method for detecting right-angle errors of corner cube prisms

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  • Received Date: December 14, 2023
  • Revised Date: March 10, 2024
  • Available Online: January 12, 2025
  • The traditional method for measuring the right-angle error of a corner cube prism involves using the Fizeau interferometric system with a single-pass method. However, this method has some limitations, including the presence of systematic aberrations caused by multiple retro-reflections and errors introduced by adjusting the tilt of the reference mirror. An improved double-pass method was used to measure the right-angle error of a corner cube prism. This method could match the irregularities of the reference light and the test light, which eliminated the effect of systematic aberration and eliminated the need to adjust the reference mirror. Experiments were carried out using a Fizeau interferometer to measure the same corner cube prism using the traditional method and the improved method. Single-pass measurements result in dihedral angle errors of 0.978 5 μrad, 1.536 8 μrad, and −0.355 8 μrad, respectively. Double-pass measurements result in dihedral angle errors of 0.638 3 μrad, 1.260 9 μrad, and −0.311 3 μrad. The experimental results verify that the double-pass measurement method is more accurate than the single-pass measurement method.

  • [1]
    张以漠. 应用光学[M]. 4版. 北京: 电子工业出版社, 2015: 66-75.

    ZHANG Yimo. Applied optics[M]. 4th ed. Beijing: Publishing House of Electronics Industry, 2015: 66-75.
    [2]
    D. 马拉卡拉. 光学车间检验[M]. 北京: 电子工业出版社, 1978: 16-29.

    MALACARA D. Optical shop testing[M]. Beijing: China Machine Press, 1978: 16-29.
    [3]
    张健文. 六边形角锥棱镜阵列回复反射器加工方法研究[D]. 广州: 广东工业大学, 2022.

    ZHANG Jianwen. Research on machining method of hexagonal cube corner array retroreflector[D]. Guangzhou: Guangdong University of Technology of China, 2022.
    [4]
    胡国星, 赵寰, 任万杰, 等. 基于激光泰曼干涉仪的角锥反射镜误差测量[J]. 光电技术应用, 2021, 36(4): 73-78.

    HU Guoxing, ZHAO Huan, REN Wanjie, et al. Error measurement of hollow corner cube reflector based on laser Twyman interferometer[J]. Electro-Optic Technology Application, 2021, 36(4): 73-78.
    [5]
    罗青山, 安学聪, 钟亚雪, 等. 小口径角锥棱镜加工工艺研究[J]. 光学技术, 2023, 49(1): 1-4.

    LUO Qingshan, AN Xuecong, ZHONG Yaxue, et al. Study of processing technology for corner cube prism with small diameter[J]. Optical Technique, 2023, 49(1): 1-4.
    [6]
    姚喜国. 激光合成波长纳米位移测量干涉仪的非线性误差分析与补偿方法研究[D]. 浙江: 浙江理工大学, 2012.

    YAO Xiguo. Analysis and compensation of nonlinear errors in a laser synthetic-wavelength nanomeasurement interferometer[D]. Zhejiang: Zhejiang Sci-Tech University of China, 2012.
    [7]
    耿旭. 基于内反射原理测量小角度变化量的技术研究[D]. 南京: 南京理工大学, 2015.

    GENG Xu. A technical study on the measurement of small angular changes based on the principle of internal reflection[D]. Nanjing: Nanjing University of Science and Technology of China, 2015.
    [8]
    祁冰芸, 张泽宇, 周康虎, 等. 光棒干涉测量中单双通法的对比[J]. 光学仪器, 2020, 42(2): 8-13.

    QI Bingyun, ZHANG Zeyu, ZHOU Kanghu, et al. Comparison of single and double pass methods in laser rod interferometric measurement[J]. Optical Instruments, 2020, 42(2): 8-13.
    [9]
    何勇. 锥体棱镜的测试[J]. 实用测试技术, 1997, 3: 26-29.

    HE Yong. Tests on corner cube prisms[J]. China Measurement & Test, 1997, 3: 26-29.
    [10]
    何勇, 顾文礼, 陈进榜. 锥体棱镜角度误差的一种测量方法[J]. 计量技术, 1999, 3: 11-13.

    HE Yong, GU Wenli, CHEN Jinbang. A method of measuring the angular error of cone prisms[J]. Measurement Technique, 1999, 3: 11-13.
    [11]
    焦仲科, 岳永坚. 角锥棱镜的入射角及有效反射面积分析[J]. 半导体光电, 2014, 35(5): 811-816.

    JIAO Zhongke, YUE Yongjian. Analysis on the maximum incident angle and effective reflection area of cube corner retro-reflector[J]. Semiconductor Optoelectronics, 2014, 35(5): 811-816.
    [12]
    郁道银, 谈恒英. 工程光学[M]. 4版. 北京: 机械工业出版社, 2018: 363-367.

    YU Daoyin, TAN Hengying. Engineering optics[M]. 4th ed. Beijing: China Machine Press, 2018: 363-367.
    [13]
    邵继虎. 激光干涉式测角仪数据采集及处理系统的研制[D]. 哈尔滨: 哈尔滨工业大学, 2011.

    SHAO Jihu. Development of data acquisition and processing system for angle measurement based on laser interferometer[D]. Harbin: Harbin Institute of Technology of China, 2011.
    [14]
    王芳, 卢庆杰, 韩森. Fizeau干涉仪中压电陶瓷的非线性校正[J]. 压电与声光, 2020, 42(2): 273-277.

    WANG Fang, LU Qingjie, HAN Sen. Nonlinear correction of piezoelectric ceramic in Fizeau interferometer[J]. Piezoelectrics & Acoustooptics, 2020, 42(2): 273-277.
    [15]
    刘树民. 大口径锥体棱镜的制造与测量方法[J]. 光学技术, 2013, 39(5): 429-432.

    LIU Shumin. Interferometry measuring for orthogonal error in pyramidal prism[J]. Optical Technique, 2013, 39(5): 429-432.
    [16]
    郭仁慧. 数字波面干涉仪棱镜角度偏差测试技术的研究[D]. 南京: 南京理工大学, 2004.

    GUO Renhui. A study of prism angular deviation testing techniques for digital wavefront interferometers[D]. Nanjing: Nanjing University of Science and Technology of China, 2004.
    [17]
    朱怀康, 张齐元, 韩森, 等. 光程干涉仪中参考镜楔角最优补偿方式研究[J]. 应用光学, 2022, 43(5): 950-958. doi: 10.5768/JAO202243.0503004

    ZHU Huaikang, ZHANG Qiyuan, HAN Sen. Optimal compensation methods of wedge angle of reference mirror in equal optical path interferometer[J]. Journal of Applied Optics, 2022, 43(5): 950-958. doi: 10.5768/JAO202243.0503004
    [18]
    郭仁慧, 何勇, 苏俊宏, 等. 锥体棱镜角度测量误差分析与仿真[J]. 红外与激光工程, 2006, 4: 485-489.

    GUO Renhui, HE Yong, SU Junhong, et al. Analysis and simulation of testing the angle of corner cube reflector[J]. Infrared and Laser Engineering, 2006, 4: 485-489.
    [19]
    CHIAYU A, JAMES C W. Effect of retroreflection on a Fizeau phase-shifting interferometer[J]. Applied Optics, 1993, 32(19): 3472-3475.
    [20]
    匡萃方, 冯其波, 刘欣. 用矢量方法分析角锥棱镜的反射特性[J]. 应用光学, 2004, 2: 25-27. doi: 10.3969/j.issn.1002-2082.2004.02.007

    KUANG Cuifang, FENG Qibo, LIU Xin. Analysis of reflection property of cube corner retroreflector with vector expression[J]. Journal of Applied Optics, 2004, 2: 25-27. doi: 10.3969/j.issn.1002-2082.2004.02.007
    [21]
    JAN B, BOZENKO F O, BENJAMIN C P, et al. Precision metrology of dihedral angle error in prisms and corner cubes for the space interferometry mission[C]//Proceedings of Optics and Photonics 2005. San Diego: Optical Manufacturing and Testing, 2005: 1-11.
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