Fast and high-precision electric adjusting mirror

The mirror in the high-energy laser beam combining system needs to make a fast and high-precision pointing adjustment before working. A two-dimensional electrically controlled adjusting mirror was designed. The main body of the system adopted an integrated flexible support design, the drive adopted a stepping motor and a deceleration mechanism to drive the screw, the precision measurement of the mirror deflection angle adopted an eddy current sensor, and the digital signal processor (DSP) was adopted as the main control module. The working principle and design of the system were analyzed, and the system calibration method as well as the control algorithm were deeply studied. In order to meet the requirements of system adjustment speed, the S-shaped acceleration and deceleration algorithm was adopted as the control algorithm of adjusting mirror, and the system calibration method with piecewise linearity was adopted. Finally, the system was tested experimentally. The experimental results show that within the angle range of ±500″, the in-position time of adjusting mirror is within 3 s, and the control error is less than 2″, which can meet the system requirements.