Two kinds of making technologies of glass micro-channel arrays and their comparison

The micro-pore glass array is the base plate of the micro-channel plate made by atomic-layer deposition technology. The distribution uniformity of the micro-pore array and the smoothness of the inner wall of each channel are very important for the subsequent fabrication of qualified micro-channel plates. The hollow-core and solid-core corrosion processes were used respectively to make the aforementioned base plate. The advantages and disadvantages of the two processes were deeply analyzed, and the key technologies of the two processes were expounded. The performance of the micro-channel plate made by atomic-layer deposition technology was compared with that made by conventional technology, and the signal-to-noise ratio of the former was better than that of the latter.