Multi-degree of freedom acquisition system based on wide-spectrum phase-shifting interferometry

To realize high-precision detection of complex products in modern industrial field, a model of multi-degree of freedom joint acquisition system was established. A model of multi-degree of freedom acquisition system based on wide-spectrum phase-shifting interferometry was established, and the optical components in the system were designed. A multi-degree of freedom joint measuring algorithm was proposed based on phase-shifting interferometry, and rationality of the system was verified. The algorithm was implemented by physical and optical parameters. The results based on Simulink show that depth measurement accuracy is at the micron level, and measurement range is at the meter level; spectrum detection resolution is at the nanometer level, the measuring bandwidth is 300 nm, which covers the entire visible light area, and spectrum accuracy is 0.2 nm, error rate is less than 0.1%. The system meets the needs of high depth resolution, wide depth measuring range, high spectrum accuracy and high spectral resolution in modern industrial precision measurement.